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ピエゾ抵抗型カンチレバーアレイによる微小な液滴の振動の計測を実現した。また、液滴振動の計測により粘度計測を推定する方法を提案した。
References :
1.Nguyen Thanh-Vinh, Kiyoshi Matsumoto and Isao Shimoyama, “MEMS force sensors for measuring droplet dynamics,” ;EMN Meeting on Droplets, Phuket, Thailand, May 8-11, 2015.
2.Nguyen Thanh-Vinh, Kiyoshi Matsumoto and Isao Shimoyama, “A viscometer based on vibtration of droplets on a piezoresistive cantilever array,” ;The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal, pp. 176-179, January 18-22, 2015.[Proceeding]
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