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In this study, we propose a 3-axis micropillar-type sensor. The sensor has a double layer of biocompatible photoresist film, which provide cell adhesive flat surface. The upper film also protects piezoresistive beams extend from the root of the micropillar. The sensor design is considered to be more suitable for detail analysis of cellular force because the force resolution of the sensor is less than 10 nN and sensing probe has only 15-square µm. It was confirmed that our sensor can detect three dimensional force generated by a single osteosarcoma cell.
References :
1.Tomoki Omiya, Takuya Tsukagoshi, Kayoko Hirayama, Nguyen Thanh-Vinh Kiyoshi Matsumoto and Isao Shimoyama, “Micropillar type three-axis force sensor for measurement of cellar force,”; The 18th IEEE International Conference on Solid-State Sensors(Transducers '15), Anchorage, Alaska, USA, June 21-25, 2015 (Accepted).
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