Piezo Resistive Sensors

• Micro force plate array for measurement of ground reaction force of insect running NEW
• A piezoresistive cellular traction force sensor NEW
• Regional 3-Axis plantar forces during stair ascent NEW
• Measurement of the Pressure Distribution During the Onset of Slip NEW
• Highly sensitive pressure sensor using a gold-coated elastic pyramid array pressing on a resistor NEW
• High Sensitive 3D Tactile Sensor with the Structure of Elastic Pyramids on Piezoresistive Cantilevers NEW
• Quantitative Evaluation of the Influence of Dopaminergic Neuron on Flapping Locomotion NEW
• Effectiveness of bristled wing of thrips NEW
• A Piezoelectric cantilever with Helmholtz resonator for a sound-triggered wake-up switch NEW
• Lateral Accelerometer Based on Sub-Micron Standing Piezoresistive cantilever with thick photoresist proof mass NEW
• Triaxial force sensor with strain concentration notch beam for measurement of insect flight force
• Three-Dimensional Airflow Velocity Vector Sensor
• A Gas Sensor Based on Viscosity Change of Ionic Liquid
• Measurement of the Impact Stress in a Golf Club Head
• Photo-Response Compensated Piezoresistive Cantilever for Use in Fluorescence Microscopy with Contact Pressure Sensor
• Sound Direction Sensor with an Acoustic Channel
• Triaxial Force Measurement Cantilever by Sidewall-Doping with Rapid Thermal Diffusion
• Piezoresistive Cantilever Embedded in Viscous Liquid to Detect Time Variation of Shear Force
• Air Pressure Sensor for an Insect Wing
• Thin and Small Ultrasonic Distance Sensor with Thermoacoustic Transmitter and Piezoresistive Cantilever Receiver
• Triaxial Tactile Sensor Chips with Piezoresistive Cantilevers Mountable on Curved Surface
• A Micro Ultrasonic Wave Sensor Using Helmholtz Resonance
• A Bush-cricket-inspired Acoustic Sensor for Sound Source Direction Estimation
• Dynamic Strain Measurement of a Golf Club Head on Impact by MEMS Strain Sensors
• Air Flow Sensor for an Insect-like Flapping Wing
• Insertion Force Sensor by Sidewall-Doping
• Ultrasonic Microphone using Cantilever Sensor with Closed-End Air Columns
• Binding Force Measurement in Aqueous Solution (movie)
• Standing Cantilevers with Piezoresistors
• Angular Acceleration Sensory Hair
• Submicron-Thick Force Sensing Cantilever
• Sensory Hair Sensor Modeled on Insects
• Force Measurement Microneedle

Inductor

• Microinductor-Based Artificial Tactile Mechanoreceptor Embedded in PDMS

• Nanocrystalline porous silicon ultrasonic transmitter with patterned emission area
• Microflight Mechanism with Rotational Wings
• High-Aspect-Ratio PZT Structure

Camera Devices

• Scanning Micromirror using Deformation of a Parylene-Encapsulated Liquid Structure
• Thin electrowetting controlled optical system with pan/tilt and variable focus functions
• Angle Tunable Liquid Wedge Prism
• Thin Camera with a Zoom Function (movie)

Microlens & Compound Eyes

• Micro Liquid Ball Lens Fabricated by Parylene-on-Liquid Deposition
• Measurement of Elastic Tension of Parylene Films Deposited on Liquid
• Tilted Paraboloidal Reflective Lens for Far Infrared Sensor Fabricated by Mask with Rectangular Openings
• Micro Liquid Prism
• Varifocal Infrared Imaging Lens By Parylene-on-liquid-Deposition
• Active Parylene-encapsulated Droplets for Displays
• Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid
• Artificial Compound Eyes with Retinal Scanning
• Optical Waveguide with Lens Effect Terminal
• Elastic Thin-Film Microlens Array
• Compound-Eye Shaped Visual Sensor

Others

• Micro Liquid Ball Lens Fabricated by Parylene-on-Liquid Deposition
• Reflective Display Using Ionic Liquid
• Solution Electrochemiluminescent Microfluidic Cell for Flexible and Stretchable Display
• Tapered Waveguide by Liquid for a Coupler of Optical Fibers
• Biomolecular Image Sensor of Bacteriorodopsin

MRI

• Micro planar coil for local high resolution magnetic resonance imaging
• Flexible Micro Receiver for MRI

Micro Coil

• Out-of-Plane Microcoil Structure

Remote Powering

• Selective Actuation using Remote Powering

Nano Probing Systems

• Nano Probing System for Cell Injection
• Silicon Based Nano Lead for Single Cell Recording
• Micro Manipulator Haptic System using Micro Cantilever Force Sensor
• Integrated Multi-Functional Probe

Life Science & Medical

• Scanning Mirror Device Using the Transformation of a Liquid Driven by Controlling the Wettability Index
• Stretchable Substrates for the Measurement of Intracellular Calcium Ion Concentration Responding to Mechanical Stress
• Measurement of Protein Concentration Using the Binding Force Between Two Surfaces
• Optical Blood Test Device using Micro FPI
• SPR Sensor with a V-Shaped Silicon Prism Array
• Attitude Control System for Endoscopic Capsule
• SMA Electrode for Recording Neural Signal

Others

• DNA-based self-assembly method of MEMS microparticles
• Analysis of Liposme Water Two Phase Flow in Micro Channel
• Sub-Micron Aperture Plate for Intracellular Calcium Transient Mesurement
• Telemetry System for Recording Neural Signals
• Servo-Sphere System for Neuroethology

• Patterning of Micro-Droplets in Nonpolar Solvent by Electro-Emulsification and Electrophoresis NEW
• Active Ink-Jet Nozzles
• Direct Ink-Jet Printing of Electric Materials
• Miniature Fuel Cell with Conductive Silicon Electrodes
• Electro-Osmotic Pump
• EWOD Based Micro Injection
• MEMS Glass Capillary for Micro Injection

Photonics and Plasmonics

• Batch fabrication of a double-layer metamaterial resonator using scalloping structures NEW
• A measurement method for light transmittance of layered metamaterials NEW
• Force Sensor Based on Metal Nanoparticle
• Tunable SPR Coupler by Flexible Polymer Grating
• Nano-pattern replication using parylene thin film for optical applications
• Mechanical Tuning of Photonic Crystal Waveguide

Carbon NanoTubes and Graphene

• A graphene FET gas sensor gated by ionic liquid NEW
• Direct Physical Exfoliation And Transfer of Graphene Grown Via Ethanol Chemical Vapor Deposition
• Placement of Carbon Nanotubes by Stamping Transfer
• Integration of Bridging-Structural SWNTs on Flexible PDMS Sheet by Stamping Transfer
• Floating Silicon Structure Supported by Carbon Nanotubes
• Batch fabrication of CNTs at AFM probe tips
• Force sensor using carbon nanotubes directly synthesized on micro structure
• Batch Fabrication of Carbon Nanotubes on Tips of a Silicon Pyramid Array
• Density Control of CNT by using the Ethanol Vapor Flow
• Selective Bridging of Single-Walled Carbon Nanotubes
• SWCNT Measurement using Cantilever

Quantum Dots

• Quantum Dot Light Emitting Device

Stampings

• Temperature-Controlled Transfer and Self-Wiring for Multi-Color LED Display on a Flexible Substrate
• Hidden Vertical Comb-Drive Actuator
• 3D integration of heterogeneous MEMS structures by stamping transfer

Micro Castings

• Three-dimentional artificial insect wing by micro casting

Magnetic Field Assemblings

• Multi-Step Seaquential 3D Self-Assembly (movie)
  
• Sequential Assembly using Magnetic Field
• Miniature Model

pH Controls

• Sequential Self-Assembly by Changing pH
• Measurement of Distance Dependence of Hydrophobic Interaction

Others

• Porous Parylene And Effects of Liquid on Parylene Films Deposited on Liquid
• Fabrication of Three Dimensional Silicon Structures Using Mask with Rectangle Openings

Flapping Flights

• Artificial butterfly wing on a butterfly-type ornithopter
• A Study of Insect Flight Using Motor-driven Ornithopter
• Small sized flapping robot flight
• Dragonfly-Type Ornithopter
• Butterfly-Type Ornithopter(movie)
• Hovering Flight Ornithopter
• Flapping Flight Whirl

Insect Based Robots

• Pheromone Guided Robot
• Odor Searching Robot (movie)
• Insect Based Hexapod Robot (movie)

Sensors

• Micro Suction Cup Array for Wet/Dry Adhesion
• Differential Pressure Distribution Measurement of Insect-Like Ornithopter with MEMS Sensors
• Surface Shape Estimation Using Tactile Sensors
• Measurement of Differential Pressure on a Butterfly Wing
• Measurement of Differential Pressure on Wing Surface Using an Ornithopter Modeled on Insects
• Three Dimensional Arrangement of Sensors
• Surface Shape detection with shear stress sensor
• Detection of center of gravity for stable grasp by using a shear stress sensor

Others

• Energy Harvesting from Mechanical Deformation of a Car Tire for Wireless System
• Propulsive characteristic of helical screw based on flagellum of swimming bacteria
• Robot Hand with Artificial Muscle

3D Displays

• An Autostereoscopic Method Using a Parallax Barrier and a Microlens Array
• Electrocromic voxel array for 3D display
• Transmissive multi-view autostereoscopic display
• The Curved Surface Stereoscopic Display using Laser Scanning
• Pop-Up Display with 3D Microlens Structures (movie)
• Stereoscopic Display using Laser Scanning
• 3D Display with Scanning Mechanism
• Droplet Scanning Filter for 3D Display

High Resolution Displays

• Tunable Structural Color Display
• Diffraction-Limited-Resolution Color Display
• OLED Stripes Patterned by Stamping Method
• OLED Light Emitting Dot on MEMS Actuator

Others

• Mechanically Flexible and Expandable Display with Conductive-Polymer-Coated Nylon Fabric

• Thermal-based Skin Moisture Device with Contact Pressure Sensor
• Implantable Telemetry Capsule for Monitoring Arterial Oxygen Saturation and Heartbeat
• Organic Semiconductor Based Strain Sensors
• SaO2 Measurement System from Refleted Light Intension
• Mobile Pointing Shoes
• Wearable Input Device using Accelerometer