In this paper, we propose a flexible tactile sensor sheet with triaxial tactile sensor chips which are modularized and covered with PDMS, and can be easily arranged on a flexible wiring substrate for attaching on robot-hands. The sensor chips are composed of two standing cantilevers and a beam for shear stress and normal stress detection, respectively. These sensors were fabricated on an SOI wafer and diced into 2-mm-square chips after embedding the SOI wafer in PDMS. The resistance change of the cantilever and the beam were 4.85×10^-4 kPa^-1 for shear stress and 3.93×10^-5 kPa^-1 for normal stress, respectively.

References :
Yusuke Tanaka, Akihito Nakai, Eiji Iwase, Takanori Goto, Kiyoshi Matsumoto and Isao Shimoyama, "Triaxial Tactile Sensor Chips with Piezoresistive Cantilevers Mountable on Curved Surface," Proceedings of the 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, 1B1-1, 2008.