This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photoresponse which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photoresponse was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.

References :
Uijin Jung, Kenta Kuwana, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy with Contact Pressure Sensor,”IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS '10), pp.588-591, Hong Kong, China, Jan. 25-28, 2010． [Proceedings]