A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 µm pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which is actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap and SPR curve was measured by scanning the incident angle of laser light with the flap.

References :
Naoko Tsujiuchi, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “A Surface Plasmon Resonance Sensor with a V-Shaped Silicon Prism Array,” 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 522-525, Istanbul, Turkey, January 22-26, 2006. [Proceedings]