A Remote Inductive Powering System
for Driving an Electrostatic Microactuator


 

An 8 mm square 20-turn planar coil is used as a receiver coil. The output voltage of about 45 V was maximally obtained from the receiver. The displacement of the actuator was remotely controlled by changing the transmitter's frequency.

References :
Shoji Takeuchi, Nobuyuki Futai, Isao Shimoyama, “Selective Drive of Electrostatic Actuators using Remote Inductive Powering,” 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 574-577, Interlaken, Switzerland, Jan. 21-25, 2001. [Proceedings]

Shoji Takeuchi, Isao Shimoyama, “A Remote Inductive Powering System for Driving Microacuators,” The 6th International Conference on Motion and Vibration Control (MOVIC '02), Urawa, Japan, Aug. 19-23, 2002.

Shoji Takeuchi, Isao Shimoyama, “Selective Drive of Electrostatic Actuators using Remote Inductive Powering,” Sensors and Actuators A, vol. 95, pp. 269-273, 2002. [Paper]