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The Ti-Ni thin films are deposited by sputtering and patterned by wet etching.
The transformation temperatures of the SMA thin films were 48 °C.
The neural activity from a living insect was successfully recorded with this microelectrode.
References :
Shoji Takeuchi, Isao Shimoyama, “An RF-telemetry System with Shape Memory Alloy Microelectrodes for Neural Recording of Freely Moving Insects,” the 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, pp. 491-496, Lyon, France, Oct. 12-14, 2000. [Proceedings]
Shoji Takeuchi, Isao Shimoyama, “A Three-Dimensional Shape Memory Alloy Microelectrode with Clipping Structure for Insect Neural Recording,” Journal of Microelectromechanical Systems, vol. 9, no. 1, pp. 24-31, 2000. [Paper]
Shoji Takeuchi, Isao Shimoyama, “A Wireless Telemetry System with an SMA Microelectrode for Neural Recording of Freely Moving Insects,” 4th Japan-France Conference on Biosensor and Bioelectronics, Tokyo, Japan, Oct. 23-26, 2001.
Shoji Takeuchi, Isao Shimoyama, “A Radio-Telemetry System with a Shape Memory Alloy Microelectrode for Neural Recording of Freely Moving Insects,” IEEE Transaction on Biomedical Engineering, vol. 51, no. 1, pp. 133-137, 2004. [Paper]
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