Measuring Angular Acceleration
with a Sensor Based on Sensory Hair


 

We made an angular accelerometer using a circular channel and a sensory hair fabricated with MEMS techniques. Since the angular acceleration can be evaluated only by measuring the change of the resistance value of the sensory hair, the angular accelerometer can be made simpler, compared with other rotary motion sensors. We fabricated the angular accelerometer of this method and assessed the characteristics. In this research, we achieved the angular accelerometer of the simple structure with which we can measure the angular acceleration of 1 rad/s2 or more of the frequency of 5 Hz or less.