This paper describes an integration method of bridging-structural single-walled carbon nanotubes ( SWNTs ) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield ( 97.8 % ) and accuracy ( position error < 100 nm ). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.

References :
Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto and Isao Shimoyama, “Integration of Bridging-Structural SWNTs on Flexible PDMS Sheet by Stamping Transfer,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 551-554, Sorrento, Italy, January 25-29, 2009. [Proceedings]