This paper reports on air pressure sensors for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250 μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10^-3 Pa^-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured.

References :
Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama, “Air pressure sensor for an insect wing,” IEEE 22th International Conference on Micro Electro Mechanical Systems (MEMS '09), pp.825-828, Sorrento, Italy, Jan. 25-29, 2009． [Proceedings]