We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes, and carried out the CVD process to synthesize CNTs. After the CVD process, we observed the tips of the AFM probes with a scanning electron microscope (SEM). The yield of CNT-AFM probes was about 52 %. The CNTs were determined by resonance Raman spectroscopy using a 488 nm argon ion laser. Observed Raman peaks were peculiar to single-walled carbon nanotubes
(SWNTs). Then we obtained AFM images of a sample grating with the CNT-AFM probes. The CNT-AFM probes had higher horizontal resolution than standard commercial AFM probes.
Kazuhiko Takagahara, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao
Shimoyama, gBatch Fabrication of Carbon Nanotubes at AFM Probe Tips and AFM Imaging,h
The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 713-716, Tucson, Arizona, USA, January 13-17, 2008.