We have proposed batch fabrication of silicon pyramids with upward CNTs on the tips at one time by a chemical vapor deposition (CVD) process. To synthesize upward CNTs on the pyramid tips, an upward electric field was applied to the siliconpyramid array during the CVD process. As a result, about 70% of 100 × 100 silicon pyramid array had CNTs on the tips. Our method would be valuable for fabricating probes of atomic force microscope (AFM) with CNTs on the tips (CNT-AFM probes).

References:
Kazuhiko Takagahara, Yusuke Takeie, Kiyoshi Matsumoto, Isao Shimoyama, “Batch Fabrication of Carbon Nanotubes on Tips of a Silicon Pyramid Array 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07) , pp. 855-858, Kobe, Japan, Jan. 21-25, 2007. Proceedings