Fabrication of Micro Glass Tube with MEMS Technology


 

The fabrication of micro glass tube by use of MEMS technology is proposed. This glass tube is intended for micro-injection in the field of biology. Glass micropipettes have been used for the injection of dye or chemical agents and as an electrode for measuring response of neural activity. By using MEMS technology, we can integrate several kinds of sensors. We fabricated thermally grown SiO2 tubes which are 12 mm long,10 µm high and 150, 80, 50 µm wide. We conducted experiments on the hydrophilicity of the tube by the capillary action, and evaluated it through the theory.