We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial.
Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto and Isao Shimoyama, gTunable metamaterials by controlling sub-micron gap for the THz range,h The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 1221-1224, 26-30 January, 2014. [Proceedings]