We developed a piezoresistive accelerometer using submicron cantilever. Since the thickness of cantilever is 300nm, it offers high resolution with the piezoresistance change is 1.92×10^-3 [G^-1] even with a small proof mass made by spincoating 30μm-thick KMPR-1035 photoresist on the surface. Furthermore the sensor functions as a lateral accelerometer by applying residual force to bend cantilever standing out of SOI wafer.

References :
Hoang Phuong Phan, Kiyoshi Matsumoto, and Isao Shimoyama, “Lateral Accelerometer Based on Sub-Micron Standing Piezoresistive
Cantilever with Thick Photoresist Proof Mass,” The 6th IEEE Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT , 2013), Nanjing, China, 8-11 July, 2012.