Sensory hair sensor is a new air flow sensor. Thin wire called "Sensory hair" is attached onto the center of a cross-shaped beam, of which strain gauges are fabricated on the basis. The structure, called "Sensory hair structure", has the order of several millimeters. As air flow pushes the sensory hair, the direction and velocity of the air flow can be measured from the deformation of the beams measured by the strain gazes. By moving straight slider around 100 mm/s, characteristics of the sensor are measured.
Yoshihiro Ozaki, Tomoyuki Ohyama, Takashi Yasuda, Isao Shimoyama, “An Air Flow Sensor Modeled on Wind Receptor Hairs of Insects,” 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 531-536, Miyazaki, Japan, Jan. 23-27, 2000. [Proceedings]