We propose a tactile sensor with standing cantilevers embedded in viscous liquid. The viscous liquid was covered with an elastic body. Since the micro cantilevers were kept free in the liquid, they can detect large shear forces without damaging. When shear forces were applied to the sensor surface, they deform the elastic body and the viscous liquid. Since the standing cantilevers follow deformations of viscous liquid, shear forces can be detected with resistance changes of the cantilevers. If the shear force was kept constant, the cantilevers in liquid return to their initial posture. From this mechanism, the proposed sensor can detect the change of shear forces without damaging.

References :
Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama, “Flexible Tactile Sensor Sheet with Liquid Filter for Shear Force Detection,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 785-788, Sorrento, Italy, January 25-29, 2009. [Proceedings]