This paper reports a simple method of making a three dimensional arrangement of MEMS sensors. In this method, a convex polyhedron is made up by folding the development which consists of structural plates and elastic hinges, and MEMS sensors are attached to its surfaces. The angle between two adjacent plates is determined geometrically by the dimensions of structures and only gravity is used to fold the development. We designed and fabricated the half structure of a truncated icosahedron which is well-known as a soccer-ball-shape, and attached 3-axis tactile sensors to all of its surfaces. The diameter of fabricated structure was 12 mm.

References :
Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama, “Three Dimensional Arrangement of Sensors using Development,” 21th International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 832-835, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]