We propose a process of a light emitting device fabricated on the top surface of a micro structure. The proposed process has made it possible to fabricate light sources on silicon micro actuators released partly from the wafer. The light source is an Organic Light Emitting Diode (OLED) composed of electrodes and an organic layer evaporated on the top surface of a micro structure.

References :
Masanao Motoyama, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Electro-Statically Actuated Light Emitting Device Using OLED,” The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), pp. 1506-1509, Boston, Massachusetts, USA, Jun. 8-12, 2003. [Proceedings]