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Varifocal Infrared Imaging Lens
By Parylene-on-Liquid-Deposition

kojo1
 

We report varifocal infrared imaging lenses for miniature infrared cameras. A droplet of liquid paraffin is sandwiched between a silicon substrate and a thin film of Parylene. Parylene is deposited directly onto the dropletfs surface. Two electrodes are fabricated on both sides of the lens. When a voltage is applied, electrodes attract each other and the liquid is pushed toward lens center. Consequently the curvature of the lens increases. The transmittance of the structure with 0.2mm thick liquid paraffin was about 10%. Infrared images of human body emission were obtained. Images were clear even when the focal length was tuned. The focal length of the 7-mm-diameter lens shortened to 43% of its initial value.

References :
Hiroyuki Kojo, Nguyen Binh-Khiem, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama,gVarifocal Infrared Imaging Lens by Parylene-on-Liquid-Deposition,h Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 2S32, 2008.