Micro Manipulator Haptic System
using Micro Cantilever Force Sensor


 

In this paper, we propose a monoaxial micro manipulation system with bilateral haptic interface This system utilizes a force sensing micro cantilever as the micro end-effector. The force sensing resolution was about 0.5 pN. The positioning resolution was about 5 nm. The spring constant of the cantilever was 1.7 × 10-3 N/m . In order to evaluate the system, we moved micro glass beads. Force was measured during the manipulation. A force about 60 nN was needed to move one bead. In order to provide an intuitive manipulation, the feedback force was needed to be about 107-108 times the size of force which is obtained by the sensor. Using this system, forces of nN order can be haptically displayed with a magnitude of some Newtons which is large enough for a human to perceive.