We observe that Parylene thin-films deposited on liquid droplets induce tensions
that continuously deform the droplets towards more spherical shapes during deposition.
We calculate these tensions based on the shape change and find that those of 1 Êm thick
Parylene-C films deposited on liquids have magnitudes more than 700 ÊN/mm, one order
larger than the surface tensions of many liquids. Parylene film tensions therefore must be
the primary factor determining the final shape of Parylene encapsulated droplets.
These tensions also indicate tensile stresses in such Parylene thin-films, which is contrary
to reported compressive inherent stresses of those deposited on solid substrates..
Nguyen Binh-Khiem, Kiyoshi Matsumoto, Isao Shimoyama, gMeasurement of Elastic Tension of Parylene Films Deposited on Liquid
,hIEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 556-559, Hong Kong, China, Jan. 25-28, 2010D