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The design and fabrication process of an electrically-
driven varifocal liquid microlens are
reported with experimental measurement results and
a theoretical calculation model. Droplets of oil are
sandwitched between a glass wafer and a thin-film
of parylene chemical vapor deposited (CVD)
directly onto the dropletsf liquid surface. A method
for creating fluid-filled micro chambers was realized
with two core steps: 1) placing-shaping of oil droplets
with hydrophobic/hydrophilic patterns and 2)
coating them with a thin CVD parylene film in high
vacuum condition. Liquid lenses and lens arrays of
diameter from 20ƒÊm to 10mm were fabricated. In
the tuning experiment, focal length was shortened to
20% of its initial value, from 3.8mm to 0.8mm. The
values calculated from model match the data collected
from experiments within the range of applied
voltage from 0V to 150V.
References : Binh-Khiem Nguyen, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Electrically Driven Varifocal Micro Lens Fabricated by Depositin Parylene Directly on Liquid,” 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 305-308, Kobe, Japan, Jan. 21-25, 2007.
[Proceedings]
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