In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.

References :
Minh-Dung NGUYEN, Hidetoshi TAKAHASHI, Kenta KUWANA, Tomoyuki TAKAHATA, Kiyoshi MATSUMOTO, and Isao SHIMOYAMA, "Three-Dimensional Airflow Velocity Vector Sensor,”IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 513-516, Cancun, Mexico, Jan. 23-27, 2011． [Proceedings]