Hidden Vertical Comb-Drive Actuator


 

This study is about complex three-dimensional (3-D) MEMS devices fabricated on poly-dimethylsiloxane (PDMS) by a parts-transfer method. Our target size of parts is 100-μm-order in our parts-transfer method. First, we evaluate the transfer yield and the positioning accuracy. Secondly, we assemble a hidden vertical comb-drive actuator, including comb-electrodes and a support beam underneath its upper plate. Finally, we measure the drive characteristics of the actuator. Our actuators are the first demonstration of fabricating movable MEMS devices by the parts-transfer technique. This demonstration indicates that complex 3-D MEMS devices with movable mechanical functions can be fabricated simply by using our method.

References :
Eiji Iwase, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama, “Hidden Vertical Comb-Drive Actuator on PDMS Fabricated by Parts-Transfer,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 116-119, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]