Multi-Step Sequential Batch Self-Assembly
of Three-Dimensional Micro-Structures
using Magnetic Field


 

We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferro-magnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. We found that a non-dimensional factor that depends on a shape of the hinged-structure determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.

References :
Eiji Iwase, Isao Shinoyama, “Multi-Step Sequential Batch Self-Assembly of Three-Dimensional Micro-Structures using Magnetic Field,” 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 588-591, Miami, Fulorida, USA, January 30-February 3, 2005. [Proceedings]

Eiji Iwase, Isao Shimoyama, “A Design Method for Out-of-Plane Structures by Multi-Step Magnetic Self-Assembly,” Sensors and Actuators A, vol. 127, no. 2, pp. 310-315, 2006. [Paper]

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