Sequential Batch Assembly of
3-D Microstructures with Elastic Hinges
by a Magnetic Field


 

This research is about three-dimensional (3-D) microstructure assembly using an external magnetic field. An external magnetic field perpendicular to a substrate lifts up a hinged structure due to the shape magnetic anisotropy. Micro flap structures (4.5 µm-thick electroplated Permalloy) having 0.2 µm-thick nickel elastic hinges with various lengths and widths are bent in out-of-plane direction in a magnetic field up to 50 kA/m. The volume of magnetic material and the stiffness of the hinges determine the sensitivity to a magnetic field. As a result, we achieved sequential batch assembly using different sensitivities for each plate.

References :
Eiji Iwase, Shoji Takeuchi, Isao Shimoyama, “Sequential Batch Assembly of 3-D Microstructures with Elastic Hinges by a Magnetic Field,” 15th IEEE International Micro Electro Mechanical Systems (MEMS '02), pp. 188-191, Las Vegas, Nevada, USA, Jan. 20-24, 2002. [Proceedings]

Eiji Iwase, Isao Shimoyama, “Multistep Sequential Batch Assembly of Three-Dimensional Ferromagnetic Microstructures with Elastic Hinges,” Journal of Microelectromechanical Systems, vol. 14, no. 6, pp. 1265-1271, 2005. [Paper]

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