We proposed floating Si structures supported by carbon nanotubes (CNTs). By synthesizing CNTs on Si structures supported by SiO₂ layer and removing the SiO₂ layer after CNTs synthesis, we can obtain the CNT-supported floating Si structures. This proposed method enables simple and batch fabrication of the structure. This structure has mechanical advantages such as high stiffness and elasticity. We examined the property of this structure and confirmed that CNTs played a role of a wiring as well as a supporting material.

References :
K. Ishitaki, Y. Takei, E. Iwase, K. Matsumoto and I. Shimoyama, “Floating Silicon Structure Supported by Carbon Nanotubes,” Proceedings of the 4th Asia-Pacific Conference On Transducers and Micro-Nano Technology, 3B1-1, Tainan, Taiwan, June 22-25, 2008.