We have made a smart inkjet nozzle array designed for multi-layer patterning of functional materials. Each nozzle comprises a visual sensor and a mechanically moving actuator to achieve independent alignment control of the ink-jets. The landing position of ejected inkjets were success-fully controlled by the actuated nozzle. Wave-form patterns of a fluorescent dye were printed by the fabricated proto-type. The built-in microlenses showed a resolution good enough to obtain two-micro-meter-precision alignment. Coupled with a CMOS image sensor integrated with processing circuitry, the fabricated nozzle array will eventually achieve pattern-ing of functional materials on flexible substrates.

References :
Kazunori Hoshino, Takaharu Nagai, Yoshio Mita, Masakazu Sugiyama, Kiyoshi Matsumoto, Isao Shimoyama, “Active Ink-Jet Nozzles Equiped With Arrayed Visual Sensors For Parallel Alignment Control,” 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 48-51, Miami, Fulorida, USA, January 30-February 3, 2005. [Proceedings]