We propose a pneumatically actuated microlens array on a transparent and elastic thin film made of cured PDMS (polydimethylsiloxane). The lenses are 120 µm in diameter and are arranged on the top surface of 200 µm-thick base film. The lenses can be moved by pneumatic actuators implemented in the bottom side of the film. Since the lens array and the base film are made of an elastic material PDMS, this array could be applied to the surfaces of curved or flexible devices. Properties of PDMS as a material for optical elements are investigated through the evaluation of the system. We also propose a simulation technique to analyze Mechanical and optical properties of deformable optical elements by combining finite element method and ray tracing technique. The optical properties of the fabricated lens array were analyzed using the simulator. This research is a first approach to construct a thin and elastic scanning lens array which can be applied for sensing or imaging applications. actuator deforms and actuates lenses when some of the chambers are pressurized or depressurized through the capillaries connected to the chambers. The size of capillary is 20 µm in width and 20 µm in length.

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