Fabrication Method for Out-of-Plane Coil
by Surface Micromachining


 

We demonstrate fabrication method for out-of-plane coil which is produced by using a combination of planar surface micromachining and post release folding process. Different from the conventional planar micro coil fabrication technology, by using this method, it is possible to obtain large number of turns surrounding a large area in free space. Since polyimide flexible joints are used in the structure, it is possible to change the area of the center of the coil, which results in a variable inductance value. A large range of inductance value (100-300 nH) can be obtained by changing the angle of the erected structure.

References :
Murat Gel, Shoji Takeuchi, Isao Shimoyama, “Fabrication Method for Out-of Plane Coil by Surface Micromachining,” The 11th International Conference on Solid-State Sensors and Actuators (Transducers '01/Eurosensors XV), Munich, Germany, Jun. 10-14, 2001.

Murat Gel, Shoji Takeuchi, Isao Shimoyama, “Fabrication Method for Out-of-plane, Micro-coil by Surface Micromachining,” Sensors and Actuators A, vol. 97-98, pp. 702-708, 2002. [Paper]