In this research, we designed and fabricated a thin and deformable LC circuitry intended for tactile sensing. It consists of pressure-sensitive capacitors and planar spiral coils, and needs only 3 wires to obtain signals from each sensor. A prototype array of coils and capacitors has been fabricated and tested. It can detect pressure by frequency deviations of 105 [Hz/(g/mm²)] order in the 60 [MHz] to 300 [MHz] band of trap frequency values, and the 3-wire measurement was achieved.

References :
Nobuyuki Futai, Takashi Yasuda, Isao Shimoyama, “Micromachined Planar Coil Tactile Sensors Implantable in Soft Structure,” the 2000 ASME International Mechanical Engineering Congress & Exposition (IMECE '00), pp. 51-56, Orlando, Florida, USA, Nov. 2000.

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama, “Simulation, Fabrication and Evaluation of Microinductor-based Artificial Tactile Mechanoreceptor Embedded in PDMS,” 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 206-209, Kyoto, Japan, Jan. 19-23, 2003. [Proceedings]

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama, “A Flexible Micromachined Planar Spiral Inductor for Use as an Artificial Tactile Mechanoreceptor,” Sensors and Actuators A, vol. 111, pp. 293-303, 2004. [Paper]