We propose a sensor for measuring temperature of micro regions with ratiometric fluorescence dye beads encapsulated by polymer thin film. Fluorescence dyes can be used as a temperature indicator, because a fluorescence intensity of some dyes depends on their temperature. We can fabricate encapsulated micro beads with constant size and dye concentration, which is suitable and preferred for precise sensing using fluorescence intensity measurement. This micro bead type sensor can be used for micro regions, which have been difficult in conventional methods. We demonstrate that this sensor is able to measure the temperature of micro regions with the accuracy ranging from ± 0.8 °C to ± 3.7 °C.

References :
Hironori Aoki, Tetsuo Kan, Nguyen Binh-Khiem, Kiyoshi Matsumoto, and Isao Shimoyama, "Micro Bead Type Temperature Sensor with Ratiometric Fluorescence Dyes Encapsulated by Parylene,”IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 513-516, Cancun, Mexico, Jan. 23-27, 2011． [Proceedings]