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Department of Mechano-Informatics, Graduate School of Information Science and Technology, the University of Tokyo

Publication

International Journal

Japanese Journal

Books

International Conference Proceedings

    2018

  1. Kenei Matsudaira, Hidetoshi Takahashi, Kayoko Hirayama Shoji, Thanh-Vinh Nguyen, Takuya Tsukagoshi, and Isao Shimoyama,“Load dependency measurement of iPS cell-derived cardiomyocytes' contraction,” IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS2018), pp. 129-132, Belfast, Northern Ireland, 21-25 January, 2018. [Proceedings]

  2. Thanh-Vinh Nguyen and Isao Shimoyama,“Reducing the contact time of droplet impact by active control of substrate motion,” IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS2018), pp. 202-205, Belfast, Northern Ireland, 21-25 January, 2018. [Proceedings]

  3. Hidetoshi Takahashi and Isao Shimoyama,“Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array,” IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS2018), pp. 214-217, Belfast, Northern Ireland, 21-25 January, 2018. [Proceedings]

  4. Takehiro Hagiwara, Hidetoshi Takahashi, Tomoyuki Takahata, and Isao Shimoyama,“Ground effect measurement of butterfly take-off,” IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS2018), pp. 832-835, Belfast, Northern Ireland, 21-25 January, 2018. [Proceedings]

  5. Ryota Tanii, Thanh-Vinh Nguyen, Tomoyuki Takahata and Isao Shimoyama,“Elasticity sensor using different tactile properties on the chip,” IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS2018), pp. 862-865, Belfast, Northern Ireland, 21-25 January, 2018. [Proceedings]

  6. Sumihiro Kohyama, Hidetoshi Takahashi, Tomoyuki Takahata, and Isao Shimoyama,“High sensitive and large area force plate for ground reaction force measurement of ant running,” IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS2018), pp. 874-877, Belfast, Northern Ireland, 21-25 January, 2018. [Proceedings]

  7. 2017

    Transducers '17

  8. Hidetoshi Takahashi, Ryu Furuya, Tomoko Yano, Kei Ito, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Maximum force capacity of legs of a fruit fly during landing motion,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2017), pp. 1061-1064, Kaohsiung, Taiwan, 18-22 June, 2017. [Proceedings]

  9. Minh-Dung Nguyen, Kiyoshi Matsumoto, and Isao Shimoyama, “Liquid-on-beam stracture for gas sensing,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2017), pp. 297-299, Kaohsiung, Taiwan, 18-22 June, 2017. [Proceedings]

  10. Kayoko Hirayama Shoji, Ken'ei Matsudaira, Takuya Tsukagoshi, Thanh-Vinh Nguyen, Kentaro Noda, and Isao Shimoyama, “Cantilever array for measuring traction forces of cells in a confined space,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2017), pp. 191-193, Kaohsiung, Taiwan, 18-22 June, 2017. [Proceedings]

  11. Thanh-Vinh Nguyen, Hidetoshi Takahashi, and Isao Shimoyama, “MEMS-based pressure sensor with a superoleophobic membrane for measuring droplet vibration,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2017), pp. 1152-1155, Kaohsiung, Taiwan, 18-22 June, 2017. [Proceedings]

  12. Taiyu Okatani, Akihito Nakai, Tomoyuki Takahata, and Isao Shimoyama, “A MEMS slip sensor: estimations of triaxial force and coefficient of static friction for prediction of a slip,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2017), pp. 75-77, Kaohsiung, Taiwan, 18-22 June, 2017. [Proceedings]

  13. Ken'ei Matsudaira, Thanh-Vinh Nguyen, Kayoko Hirayama Shoji, Takuya Tsukagoshi, Tomoyuki Takahata and Isao Shimoyama, “MEMS force sensor array for evaluating the contractility of iPS cell-derived cardiomyocytes,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2017), pp. 36-38, Kaohsiung, Taiwan, 18-22 June, 2017. [Proceedings]

  14. MEMS '17

  15. Akihito Nakai, Kenta Kuwana, Kai Saito, Takeyoshi Dohi, Ami Kumagai, and Isao Shimoyama, “MEMS 6-axis force-torque sensor attached to the tip of grasping forceps for identification of tumor in thoracoscopic surgery,” IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, USA, 22-26 January, pp. 546-548, 2017. [Proceedings]

  16. Nguyen Thanh Vinh, Timothee Mouterde, Hidetoshi Takahashi, David Quere, and Isao Shimoyama, “Jumping force of coalescing droplets on a superhydrophobic surface,” IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, USA, 22-26 January, pp. 95-98, 2017. [Proceedings]

  17. Taiyu Okatani, Hidetoshi Takahashi, Tomoyuki Takahata, and Isao Shimoyama, “Evaluation of ground slippery condition during walk of bipedal robot using MEMS slip sensor,” IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, USA, 22-26 January, pp. 1033-1035, 2017. [Proceedings]

  18. Nobuhiko Matsuda, Nguyen Minh Dung, Tomoyuki Takahata, and Isao Shimoyama, “A multi-axis piezoresistive MEMS sensor for acoustic emission,” IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, USA, 22-26 January, pp. 1181-1183, 2017. [Proceedings]

  19. Sumihiro Kohyama, Hidetoshi Takahashi, Satoru Yoshida, Hiroaki Onoe, Kayoko Hirayama Shoji, Takuya Tsukagoshi, Tomoyuki Takahata, and Isao Shimoyama, “MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles,” IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, USA, 22-26 January, pp. 1040-1043, 2017. [Proceedings]

  20. 2016

    MEMS '16

  21. Tetsuo Kan, Yoshiharu Ajiki, Kiyoshi Matsumoto, and Isao Shimoyama, “Si process compatible near-infrared photodetector using AU/SI nano-pillar array,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 624-627, 2016. [Proceedings]

  22. Yusuke Takei, Kiyoshi Matsumoto, and Isao Shimoyama, “Wearable sweat monitoring sensor based on Ionic Liquid Gel,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 924-925, 2016. [Proceedings]

  23. Kentaro Noda, Kayoko Hirayama, Kiyoshi Matsumoto, and Isao Shimoyama, “Micro pillars with thin hydrophobic layer formed on the side walls to prevent cell protrusion toward side wall,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 501-504, 2016. [Proceedings]

  24. Nguyen Thanh-Vinh, Kiyoshi Matsumoto, and Isao Shimoyama, “Pressure distribution on the contact area during the impact of a droplet on a textured surface,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 177-180, 2016. [Proceedings]

  25. Nguyen Thanh-Vinh, Hidetoshi Takahashi, Takuya Tsukagoshi, Kiyoshi Matsumoto, and Isao Shimoyama, “The Sound of Sliding Droplet,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 843-845, 2016. [Proceedings]

  26. Kayoko Hirayama,Takuya Tsukagoshi, Nguyen Thanh-Vinh,Yasutaka Ichikawa, and Isao Shimoyama, “Piezoresistive cantilever integrated microfluidic channel for measuring cellular properties,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 698-700, 2016. [Proceedings]

  27. Ryo Aoki, Yusuke Takei, Nguyen Minh-Dung, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Detection of High-Frequency Component of Mechanomyogram,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 356-358, 2016. [Proceedings]

  28. Ryohei Kazama, HidetoshiTakahashi, Nguyen Thanh-Vinh, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Sensitivity Enhancement of a Cantilever-type Airflow Shear Stress Sensor via Surface Roughness Modification,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 839-842, 2016. [Proceedings]

  29. Wataru Ohnishi, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Cantilever with 10-fold Tunable Spring Constant using Lorentz Force,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 866-868, 2016. [Proceedings]

  30. Taiyu Okatani, Hidetoshi Takahashi, Kentaro Noda, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “A Tactile Sensor for Simultaneous Measurement of Applied Force and Friction Coefficient,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 862-865, 2016. [Proceedings]

  31. Norimasa Namioka, Yusuke Takei, Nguyen Minh-Dung, Takanori Usami, Nguyen Thanh-Vinh, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Measurment of Vacuum Pressure with Cantilever-based Differential Pressure Sensor utilizing Vapor Pressure and Narrow Gap of Cantilever,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 836-838, 2016. [Proceedings]

  32. Ryu Furuya, Hidetoshi Takahashi, Nguyen Thanh Vinh, Tomoko Yano, Kei Ito, Tomoyuki Takahata, Kiyoshi Matsumoto, and Matsumoto, Isao Shimoyama, “Measurement of Jumping Force of a Fruit Fly using a Mesa Structured Force Plate,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 165-168, 2016. [Proceedings]

  33. Nobuhiko Matsuda, Nguyen Minh Dung, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “CFRP monitoring method with piezoresistive beams,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 131-132, 2016. [Proceedings]

  34. Kenei Matsudaira, Nguyen Minh-Dung, Yusuke Takei, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Wood monitoring using MEMS acoustic sensor,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016), Shanghai, China, 24-28 January, pp. 1122-1124, 2016. [Proceedings]

  35. IIIAE '16

  36. Takahiro Omori, Takashi Usui, Kazuo Watabe, Minh-Dung Nguyen, Kiyoshi Matsumoto, and Isao Shimoyama, “Elastic wave measurement using a MEMS AE sensor,” 8th International Conference on Acoustic Emission, Kyoto, Japan, 5-9 December, pp.339-344, 2016.

  37. Isao Shimoyama and Minh-Dung Nguyen, “Super-Acoustic Sensor for Bridge Health Monitoring,” 8th International Conference on Acoustic Emission, Kyoto, Japan, 5-9 December, pp.339-344, 2016. (Invited)

  38. Other conferences '16

  39. Tetsuo Kan, Akihiro Isozaki, Natsuki Kanda,Natsuki Nemoto,Kuniaki Konishi, Hidetoshi Takahashi, Makoto Kuwana-Gonokami, Kiyoshi Matsumoto, and Isao Shimoyama, “Chiral switchable THz metamaterial with MEMS reconfigurable spirals,” Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA, 5-10 June, pp. 1-2, 2016.

  40. Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Compact coaxial thermal and color imaging system with silicon-glass hybrid lens,” Robotics and Automation (ICRA2016), Stockholm, Sweden, 16-21 May, pp. 5555-5560, 2016. [Proceedings]

  41. 2015

    MEMS '15

  42. Akihito Nakai, Yasuhiko Morishita, Kiyoshi Matsumoto, and Isao Shimoyama, “6-Axis force-torque sensor chip composed of 16 piezoresistive beams,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, 18-22 January, pp. 730-733, 2015. [Proceedings]

  43. Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “3D structural foramation utilizing glass transition of a Parylene film” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, 18-22 January, pp. 405-408, 2015. [Proceedings]

  44. Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Impact-induced hardening package for tactile sensors using dilatant fluid,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, 18-22 January, pp. 421-422, 2015. [Proceedings]

  45. Yusuke Takei, Kiyoshi Matsumoto, and Isao Shimoyama, “Ionic-Gel-coated fabric as flexible humidity sensor,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, 18-22 January, pp. 783-784, 2015. [Proceedings]

  46. Hidetoshi Takahashi, Akihiro Isozaki, Kiyoshi Matsumoto, and Isao Shimoyama, “A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, 18-22 January, pp. 706-709, 2015. [Proceedings]

  47. Nguyen Minh-Dung, Pham Quang-Khang, Nguyen Thanh-Vinh, Kiyoshi Matsumoto, and Isao Shimoyama, “Measurement of surface acoustic waves propagation using a piezoresistive cantilever array,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, 18-22 January, pp. 144-145, 2015. [Proceedings]

  48. Nguyen Thanh-Vinh, Kiyoshi Matsumoto, and Isao Shimoyama, “A viscometer based on vibration of droplets on a piezoresistive cantilever array,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, 18-22 January, pp. 176-179, 2015. [Proceedings]

  49. Ryo Watanabe, Nguyen Minh-Dung, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Fusion of cantilever and diaphragm pressure sesors according to their frequency characteristics,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, pp. 212-214, 18-22 January, 2015.[Proceedings]

  50. Ryo Matsui, Yusuke Takei, Nguyen Minh-Dung, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Flow speed measurement with Doppler effect using ultrasonic receiver for small-sized smart catheter,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, pp. 640-642, 18-22 January, 2015.[Proceedings]

  51. Tomonori Kaneko, Nguyen Minh-Dung, P. Quang-Khang, Yusuke Takei, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Pulse wave measurement in human using piezoresistive cantilever on liquid,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, pp. 670-673, 18-22 January, 2015.[Proceedings]

  52. Ryo Aoki, Nguyen Thanh-Vinh, Kentaro Noda, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Sound focusing in liquid using a varifocal acoustic lens,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, pp. 925-927, 18-22 January, 2015.[Proceedings]

  53. Chie Suzuki, Yusuke Takei, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Measuring the propagating teeth vibration of human chewing,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, pp. 646-648, 18-22 January, 2015.[Proceedings]

  54. Ryohei Kazama, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Airflow shear stress sensor using side-wall doped piezoresistive plate,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, pp. 710-713, 18-22 January, 2015.[Proceedings]

  55. Hiroshi Ishido, Hidetoshi Takahashi, Akihito Nakai, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “6-axis force/torque sensor for spike pins of sports shoes,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015), Estoril, Portugal, pp. 257-260, 18-22 January, 2015.[Proceedings]

  56. Transducers '15

  57. Takahashi Hidetoshi, Shinnosuke Hirakawa, Kiyoshi Matsumoto, Isao Shimoyama, “Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method,” Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2015), Anchorage, USA, pp.1089-1092, 21-25 June, 2015. [Proceedings]

  58. Quang-Khang Pham, Minh-Dung Nguyen, Kiyoshi Matsumoto, and Isao Shimoyama, “Acoustic emission sensor using liquid-on-beam structure,” Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2015), Anchorage, USA, pp.1137-1139, 21-25 June, 2015. [Proceedings]

  59. Tomoki Omiya, Takuya Tsukagoshi, Kayoko Hirayama, Thanh-Vinh Nguyen, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama, “Micropillar type three-axis force sensor for measurement of cellular force,” Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2015), Anchorage, USA, pp.188-191, 21-25 June, 2015. [Proceedings]

  60. 2014

    MEMS '14

  61. Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 913-916, 26-30 January, 2014.  [Proceedings]

  62. Yusuke Takei, Tomonori Kaneko, Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “Measuring flow velocity of swallowed liquid in the human pharynx by tongue pressure sensor and swallowing sound sensor,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 849-852, 26-30 January, 2014. [Proceedings]

  63. Yoshiharu Ajiki, Tetsuo Kan, Masayuki Yahiro, Akiko Hamada, Junji Adachi, Chihaya Adachi, Kiyoshi Matsumoto and Isao Shimoyama, “Near infrared photo-detector using self-assembled formation of organic crystalline nanopillar arrays,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 849-852, 26-30 January, 2014. [Proceedings]

  64. Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto and Isao Shimoyama, “Tunable metamaterials by controlling sub-micron gap for the THz range,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 1221-1224, 26-30 January, 2014. [Proceedings]

  65. Akira Inaba, Yusuke Takei, Kiyoshi Matsumoto, and Isao Shimoyama, “Ionic liquid-gated graphene fet array with enhanced selectivity for electronic nose,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 326-329, 26-30 January, 2014. [Proceedings]

  66. U. G. Jung, T. Tsukagoshi, Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto and Isao Shimoyama, “Traction force of smooth muscle cell during growth on a rigid substrate,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 290-293, 26-30 January, 2014. [Proceedings]

  67. Nguyen Thanh-Vinh, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “Interaction forces during the sliding of a water droplet on a textured surface,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 979-982, 26-30 January, 2014. [Proceedings]

  68. Takahiro Suzuki, Yasumasa Ichikawa, Tomoyuki Takahata, Kiyoshi Matsumoto and Isao Shimoyama, “Calorimetric device for non-destructive measurement of the thermal diffusivity dependency by phase delay,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 1151-1154, 26-30 January, 2014. [Proceedings]

  69. Dinh Hoang-Giang, Nguyen Thanh-Vinh, Kentaro Noda, Phan Hoang-Phuong, Nguyen Binh-Khiem, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Micro liquid-based thermo-acoustic transmitter for emitting ultrasound in liquid medium,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 849-852, 26-30 January, 2014. [Proceedings]

  70. Kazuma Matsui, Akira Inaba, Yuta Oshidari, Yusuke Takei, Hidetoshi Takahashi, Tomoyuki Takahata, Reo Kometani, Kiyoshi Matsumoto and Isao Shimoyama, “Mechanical properties of few layer graphene cantilever,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 1087-1090, 26-30 January, 2014. [Proceedings]

  71. Tomonori Kaneko, Nguyen Minh-Dung, Ryo Aoki, Tomoyuki Takahata, Kiyoshi Matsumoto and Isao Shimoyama, “Measurement of mechanomyogram,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 845-848, 26-30 January, 2014. [Proceedings]

  72. Pham Quang-Khang, Nguyen Minh-Dung, Nguyen Binh-Khiem, Hoang-Phuong Phan, Kiyoshi Matsumoto and Isao Shimoyama, “Multi-axis force sensor with dynamic range up to ultrasonic,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, pp. 769-772, 26-30 January, 2014. [Proceedings]

  73. others '14

  74. Eiji Iwase and Isao Shimoyama, “Magnetic Self-Assembly for Three-Dimensional Microstructures,” Proceedings of the 6th International Meeting on Origami in Science, Mathematics and Education (6OSME), p.141 (paper no. 162), Tokyo, Japan, August 10-13, 2014.

  75. 2013

    MEMS '13

  76. Tetsuo Kan, Akihiro Isozaki, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto, and Isao Shimoyama, “ Spiral Metamaterial For Tunable Circular Dichroism,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 701-704, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  77. Yusuke Takei, Kentaro Noda, T. Kawai, T. Tachimura, Y. Toyama, M. Takai, Kiyoshi Matsumoto, and Isao Shimoyama, “ Anterior And Posterior Tongue Activity Sensor Based On Triaxial Force Sensor,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 1093-1096, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  78. Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “ Stretchable Force Sensor Array Using Conductive Liquid,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 681-684, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  79. Hidetoshi Takahashi, Kiyoshi Matsumoto and Isao Shimoyama, “ Micro Force Plate Array For Measurement Of Ground Reaction Force Of Insect Running,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 59-62, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  80. Akira Inaba, Kiyoshi Matsumoto and Isao Shimoyama, “ A graphene FET gas sensor gated by ionic liquid,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 969-972, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  81. Nguyen Minh-Dung, Phan Hoang-Phuong, Kiyoshi Matsumoto and Isao Shimoyama, “ A Sensitive Liquid-Cantilever Diaphragm For Pressure Sensor,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 617-620, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  82. Toru Nakakubo, Kiyoshi Matsumoto, and Isao Shimoyama, “ Patterning of Micro-Droplets in Nonpolar Solvent By Electro-Emulsification and Electrophoresis,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 1117-1120, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  83. U. G. Jung, Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto and Isao Shimoyama, “ A Piezoresistive Cellular Traction Force Sensor,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 927-930, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  84. Yoshinori Yokoyama, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “ Micropartilces In Silicon Film Using Mist-Jet Technology For A Photodetector,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 279-282, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  85. Masataka Hori, Hidetoshi Takahashi, A. Nakai, Kiyoshi Matsumoto, and Isao Shimoyama, “ Regional 3-Axis Plantar Forces During Stair Ascent,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 1033-1036, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  86. Nguyen Thanh-Vinh, Nguyen Binh-Khiem, Kiyoshi Matsumoto, and Isao Shimoyama, “High Sensitive 3d Tactile Sensor With The Structure Of Elastic Pyramids On Piezoresistive Cantilevers,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 41-44, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  87. Nguyen Thanh-Vinh, Kiyoshi Matsumoto, and Isao Shimoyama, “ Highly Sensitive Pressure Sensor Using A Gold-Coated Elastic Pyramid Array Pressing On A Resistor,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 596-599, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  88. Koki Azuma, Hidetoshi Takahashi, Tetsuo Kan, J. Tanimura, K. Ito, Kiyoshi Matsumoto and Isao Shimoyama, “Quantitative Evaluation Of The Influence Of Dopaminergic Neuron On Flapping Locomotion,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 5-8, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  89. Ken Sato, Hidetoshi Takahashi, Nguyen Minh-Dung, Kiyoshi Matsumoto, and Isao Shimoyama, “Effectiveness Of Bristled Wing Of Thrips,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 21-24, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  90. Wattanasarn Sikornron, Kiyoshi Matsumoto, and Isao Shimoyama, “3D Lorentz force magnetic sensor using ultra-thin piezoresistive cantilevers,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '13), pp. 693-696, Taipei, Taiwan, 20-24 January, 2013. [Proceedings]

  91. Transducers '13

  92. Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “ A silicon-glass hybrid lens for simultaneous color-and-thermal imaging,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 1408-1411, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  93. Kentaro Noda. Nguyen Binh-Khiem, Yusuke Takei, Kiyoshi Matsumoto, and Isao Shimoyama, “ Multi-axial confocal distance sensor using varifocal liquid lens,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 1499-1452, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  94. Minako Hosono, Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “ Dynamic response of tactile sensor applying cantilever in elastomer,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 102-105, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  95. Akihiro Isozaki, Tetsuo Kan, Keisuke Takano, Kiyoshi Matsumoto, and Isao Shimoyama, “ Double-layer wire grid polarizer for improving extinction ratio,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 530-533, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  96. Nguyen Minh-Dung, Phan Hoang-Phuong; Kiyoshi Matsumoto and Isao Shimoyama, “ A hydrophone using liquid to bridge the gap of a piezo-resistive cantilever,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 70-73, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  97. Masataka Hori. Minako Hosono, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “ 3-Axis fingertip force during playing the string instrument,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 2745-2748, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  98. WenJing Chen. Tetsuo Kan, Yoshiharu Ajiki, Kiyoshi Matsumoto, and Isao Shimoyama, “ Wavelength-selective silicon near infrared photodetector using surface plasmon resonance enhancement,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 2337-2340, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  99. Koutaro Ishizu. Yusuke Takei, Masahito Honda, Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “ Carbon dioxide gas sensor with ionic gel,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), pp. 1633-1636, Barcelona, Spain, 16-20 June, 2013. [Proceedings]

  100. 2012

    MEMS '12

  101. Hironori Aoki, Nguyen Binh-Khiem, Kiyoshi Matsumoto, and Isao Shimoyama, “Functionalized micro bead with liquid-core Parylene-shell structure,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 831 - 834 , Paris, France, 29 January-2 February, 2012. [Proceedings]

  102. Kouki Azuma, Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “Triaxial force sensor with strain concentration notch beam for measurement of insect flight force,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 140 - 143, Paris, France, 29 January-2 February, 2012. [Proceedings]

  103. Wattanasarn Sikornron, Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “3D flexible tactile sensor using electromagnetic induction coils,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 488 - 491, Paris, France, 29 January-2 February, 2012. [Proceedings]

  104. Koutaro Ishizu, Tetsuo Kan, Yusuke Takei, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “Carbon dioxide detection by surface plasmon resonance with ionic liquid,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 784 - 787, Paris, France, 29 January-2 February, 2012. [Proceedings]

  105. Nguyen Binh-Khiem, Nguyen Thanh-Vinh, Kiyoshi Matsumoto, and Isao Shimoyama, “Three dimensional microfluidic design with spincoated micrometer-thin elastomer multilayer ,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 1109 - 1112, Paris, France, 29 January-2 February, 2012. [Proceedings]

  106. Noboru Kiga, Yusuke Takei, Akira Inaba, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “CNT-FET gas sensor using a functionalized ionic liquid as gate ,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 796 - 799 , Paris, France, 29 January-2 February, 2012. [Proceedings]

  107. Ken Sato, Nguyen Binh-Khiem, Minako Hosono, Kiyoshi Matsumoto, and Isao Shimoyama, “Shear force sensor using a cantilever with liquid-embedded hinges ,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 603 - 606, Paris, France, 29 January-2 February, 2012. [Proceedings]

  108. Hidetoshi Takahashi, Akihito Nakai, Kiyoshi Matsumoto, and Isao Shimoyama, “Shear force detector using piezo-resistive beams with sidewall-doping ,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 599 - 602 , Paris, France, 29 January-2 February, 2012. [Proceedings]

  109. Yusuke Takei, Kentaro Noda, Kawai, T., Tachimura, T., Toyama, Y., Ohmori, T., Kiyoshi Matsumoto, and Isao Shimoyama, “Triaxial force sensor for lingual motion sensing,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '12), pp. 128 - 131 , Paris, France, 29 January-2 February, 2012. [Proceedings]

  110. NEMS '12

  111. Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama, “Particle sensor using an ultra-thin piezo resistive cantilever,” The 7th IEEE Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2012), pp. 826-827, Kyoto, Japan, 5-8 March, 2012.

  112. Akira Inaba, Kiyoshi Matsumoto, Isao Shimoyama, “Scale effect on electrochemical impedance of nanoelectrode,” The 7th IEEE Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2012), pp. 650-651, Kyoto, Japan, 5-8 March, 2012.

  113. Kentaro Noda, Nguyen Binh-Khiem, Yusuke Takei, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Confocal Distance Sensor with Varifocal Liquid Lens,”The 7th IEEE Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2012), pp. 432-433, Kyoto, Japan, 5-8 March, 2012.

  114. Takanori Usami, Akihito Nakai, Kiyoshi Matsumoto, and Isao Shimoyama, “50nm-thick piezo-resistive cantilever,” The 7th IEEE Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2012), pp. 1003-1004, Kyoto, Japan, 5-8 March, 2012.
  115. others '12

  116. Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda, “A Piezoelectric Cantilever with Helmholtz Resonator for a Sound-triggered Wake-up Switch,” The 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2012), pp. 295-298, Atlanta, Georgia, USA, 2-5 December, 2012.

  117. Nguyen Thanh-Vinh, Hidetoshi Takahashi, Nguyen Binh-Khiem, Kiyoshi Matsumoto, and Isao Shimoyama, “Measurement of the Pressure Distribution During the Onset of Slip,” IEEE Sensors 2012, pp. 966-969, Taipei, Taiwan, 28-31 October, 2012.

  118. Yusuke Takei, Noboru Kiga, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “Ionic Liquid based CO2 Gas Sensor,” IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012), C-4-I26-007, Yokohama, Japan, 23-28 September, 2012.

  119. Atsushi Ueta, Mitsushige Oda, Isao Shimoyama, Kiyoshi Matsumoto, Akihito Nakai, and Yoshimasa Endo, “A High-Powered Four-Finger Robotic Hand with MEMS Tri-axial Tactile Sensors,” Proceedings of the International Symposium on Artificial Intelligence, Robotics and Automation in Space (i-SAIRAS 2012), Turin, Italy, 4-6 September, 2012.

  120. Akihiro Isozaki, Tetsuo Kan, Keisuke Takano, Masanori Hangyo, Kiyoshi Matsumoto, and Isao Shimoyama, “Double-Layer Split-Ring-Resonator Array Fabricated Using Scalloping Structure,” Optical MEMS & Nanophotonics Conference, pp. 47-48, Banff, Alberta, Canada, 6-9 August, 2012.

  121. Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “Differential Pressure Measurement of an Insect Wing Using a MEMS Sensor,” The 2012 ICME International Conference on Complex Medical Engineering, Kobe, Japan, pp. 349-352, 1-4 July, 2012.

  122. Nguyen Minh Dung, Kiyoshi Matsumoto, and Isao Shimoyama, “Scale Effect of the Air-gap in cantilever and its Application,” The 6th IEEE Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT , 2013), Nanjing, China, 8-11 July, 2012.

  123. Phan Hoang Phuong, Kiyoshi Matsumoto, and Isao Shimoyama, “Lateral accelerometer based on sub-micron standing piezoresistive cantilever with thick photoresist proof mass,” The 6th IEEE Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT , 2013), Nanjing, China, 8-11 July, 2012.

  124. Nguyen Binh-Khiem, Kiyoshi Matsumoto, and Isao Shimoyama, “Porous Parylene thin-films deposited directly on liquid surfaces,” International Conference on Materials for Advanced Technologies ICMAT2011, Singapore, Singapore, pp. R1-5, 26 June-1 July, 2011.

  125. 2011

    MEMS '11

  126. Nguyen Binh-Khiem, Kiyoshi Matsumoto, and Isao Shimoyama, “Porous Parylene And Effects of Liquid on Parylene Films Deposited on Liquid,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 111-114, Cancun, Mexico, 23-27 January, 2011. [Proceedings]

  127. Kwanghyun Yoo, Yusuke Takei, Bo Hou, Shohei Chiashi, Shigeo Maruyama, Kiyoshi Matsumoto, and Isao Shimoyama, “Direct Physical Exfoliation And Transfer of Graphene Grown Via Ethanol Chemical Vapor Deposition,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 99-102, Cancun, Mexico, 23-27 January, 2011. [Proceedings]

  128. Nguyen Minh Dung, Hidetoshi Takahashi, Kenta Kuwana, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “3D Airflow Velocity Vector Sensor,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 513-516, Cancun, Mexico, 23-27 January, 2011. [Proceedings]

  129. Kazuharu Ohsawa, Hidetoshi Takahashi, Kentaro Noda, Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “A Gas Sensor Based on Viscosity Change of Ionic Liquid,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 525-528, Cancun, Mexico, 23-27 January, 2011. [Proceedings]

  130. Hironori Aoki, Tetsuo Kan, Nguyen Binh-Khiem, Kiyoshi Matsumoto, and Isao Shimoyama, “Micro Bead Type Temperature Sensor with Ratiometric Fluorescence Dyes Encapsulated by Parylene,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 928-931, Cancun, Mexico, 23-27 January, 2011. [Proceedings]

  131. Nguyen Thanh-Vinh, Hidetoshi Takahashi, Tetsuo Kan, Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “Micro Suction Cup Array for Wet/Dry Adhesion,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 284-287, Cancun, Mexico, 23-27 January, 2011. [Proceedings]

  132. Makoto Ohira, Yutaka Koyama, Fumiji Aita, Sho Sasaki, Masatoshi Oba, Isao Shimoyama, Tomoyuki Takahata, and Masafumi Kimata, “Micro Mirror Arrays for Improved Sensitivity of Thermopile Infrared Sensors,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), pp. 708-711, Cancun, Mexico, 23-27 January, 2011. [Proceedings]

  133. Transducers '11

  134. Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “Optial measurement of strain using scattering from nanoparticle pairs on elastomer,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 June, 2011. [Proceedings]

  135. Yusuke Takei, Kiyoshi Matsumoto, and Isao Shimoyama, “‘Pickup and place’ integration method of bridging carbon nanotubes by stamping strasfer,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 June, 2011. [Proceedings]

  136. Yoshiharu Ajiki, Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “SPR photo diode detector using transportation phenomenon of photon and electron coupling,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 June, 2011. [Proceedings]

  137. Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “Differential pressure distribution measurement of a free-flying butterfly wing,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 June, 2011. [Proceedings]

  138. Akira Inaba, Yusuke Takei, Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “Nanoprobe electrodes cut by physical stretch of parylene-insulated carbon nanotube bridges,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 June, 2011. [Proceedings]

  139. Nguyen Minh Dung, Hidetoshi Takahashi, Kiyoshi Matsumoto, and Isao Shimoyama, “Barometric pressure change measurement,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 June, 2011. [Proceedings]

  140. Uijin Jung, Tetsuo Kan, Kenta Kuwana, Kiyoshi Matsumoto, and Isao Shimoyama, “SI nano-pillars for measuring traction force exerted by filopodia,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 June, 2011. [Proceedings]

  141. 2010

    MEMS '10

  142. Nguyen Binh-Khiem, Kiyoshi Matsumoto, Isao Shimoyama, “Measurement of Elastic Tension of Parylene Films Deposited on Liquid,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 556-559, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  143. Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama,“Measurement of Differential Pressure on a Butterfly Wing,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 63-66, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  144. Koki Katoh, Yasumasa Ichikawa, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Thermal-Based Skin Moisture Device with Contact Pressure Sensor,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 276-279, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  145. Akira Hasegawa, Akihito Nakai, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Measurement of the Impact Stress in a Golf Club Head,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 592-595, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  146. Yuichiro Aoyama, Binh-Khiem Nguyen, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Triaxial Force Measurement Cantilever by Sidewall-Doping with Rapid Thermal Diffusion,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 619-622, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  147. Asuto Koyama, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Micro-Bead Force Sensor based on Aligned Metal Nanoparticle,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 428-431, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  148. Uijin Jung, Kenta Kuwana, Hidetoshi Takahashi, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Photoresponse Compensated Piezoresistive Cantilever under Fluorescence Measurement Environment,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 588-591, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  149. Nguyen Minh Dung, Akira Inaba, Hideotoshi Takahashi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Sound Direction Sensor with an Acoustic Channel,” The 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), pp. 655-658, Hong Kong SAR, China, 24-28 January, 2010. [Proceedings]

  150. others '10

  151. Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “Skin-type Tactile Sensor Using Standing Piezoresistive Cantilever for Micro Structure Detection,” The 9th Annual IEEE Conference on Sensors (Sensors2010), Hawaii, USa, 1-4 November, 2010.

  152. Tetsuo Kan, Hiroyuki Kojo, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Long-Range SPR Sensor with Micro Liquid Channels for Maintaining Symmetrical Condition,” 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2010), pp. 1970-1972, Groningen, Netherlands, October 3-7, 2010.

  153. Minako Hosono, Kentaro Noda, Kiyoshi Matsumoto, and Isao Shimoyama, “Flexible Force Sensor Sheet for Preventing Pressure Ulcers,” International Society for Gerontechnology 7th World Conference (ISG2010), Vancouver, Canada, 27-30 May, 2010.

  154. Yusuke Takei, Atsushi Hashimoto, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Integration Method of Bridging-structural CNTs into Si Wafer by Stamping Transfer,” International Conference on Electronics Packaging 2010 (ICEP2010), FC2-3, 12-14 May, 2010.

  155. Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Stretchable Liquid Tactile Sensor for Robot-Joints,” 2010 IEEE International Conference on Robotics and Automation (ICRA2010), Alaska, USA, 3-8 May,2010.

  156. 2009

    Transducers '09

  157. Kentaro Noda, Yasushi Hashimoto, Yusuke Tanaka, and Isao Shimoyama, “Mems on Robot Applications,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), Colorado, USA, 21-25 June, 2009. [Proceedings]

  158. Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “Nano-Pillar Structure for Sensitivity Enhancement of SPR Sensor,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), T4C.002, Colorado, USA, 21-25 June, 2009.[Proceedings]

  159. Yasushi Hashimoto, Akihito Nakai, Kiyoshi Matsumoto, and Isao Shimoyama, “Single Pulse Proximal Distance Sensor with Thermoacoustic Transmitter,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), T3P.076, Colorado, USA, 21-25 June, 2009.[Proceedings]

  160. Koki Katoh, Yasumasa Ichikawa, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Material Discrimination By Heat Flow Sensing,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), Colorado, USA, 21?25 June, 2009.[Proceedings]

  161. Satoshi Komatsu, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Peristaltic Micropump Fabricated by Depositing Parylene Directly on Liquid,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), T4F.007, Colorado, USA, 21-25 June, 2009.[Proceedings]

  162. Akira Suzuki, Hidetoshi Takahashi, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Sensitivity enhancement by micro Helmholtz resonator for ultrasonic distance sensor,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), Colorado, USA, 21-25 June, 2009.[Proceedings]

  163. Koutaro Suzuki, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Self-Aligned Opposite Mirrors for Tilting Field of View Driven by Electrowetting,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), Colorado, USA, 21-25 June, 2009.[Proceedings]

  164. Atsushi Hashimoto, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Adhesion Force Measurement between Silicon And Carbon Nanotubes Synthesized by Chemical Vapor Deposition,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), Colorado, USA, 21-25 June, 2009. [Proceedings]

  165. Ryoh Miyamoto, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Ellipsoidal Micro Lens Fabricated by Depositing Parylene Directly on Liquid,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009), T3P.122, Colorado, USA, 21-25 June, 2009. [Proceedings]

  166. MEMS '09

  167. Eiji Iwase, Hiroaki Onoe, Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama, “Temperature-Controlled Transfer and Self-Wiring for Multi-Color LED Display on a Flexible Substrate,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 176-179, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  168. Tomoyuki Takahata, Kiyoshi Matsumoto, Isao Shimoyama, “Tilted Paraboloidal Reflective Lens for Far Infrared Sensor Fabricated by Mask with Rectangular Openings,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 975-978, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  169. Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Integration of Bridging-Structural SWNTs on Flexible PDMS Sheet by Stamping Transfer,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 551-554, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  170. Seiichi Takamatsu, Kiyoshi Matsumoto, Isao Shimoyama, “Stretchable Yarn of Display Elements,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 1023-1026, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  171. Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama, “Flexible Tactile Sensor Sheet with Liquid Filter for Shear Force Detection,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 785-788, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  172. Yun Jung Heo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Stretchable Substrates for the Measurement of Intracellular Calcium Ion Concentration Responding to Mechanical Stress,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 68-71, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  173. Nguyen Binh-Khiem, Kiyoshi Matsumoto, Isao Shimoyama, “Reflective Display using Ionic Liquid,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 168-171, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  174. Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama, “Air Pressure Sensor for an Insect Wing,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 825-828, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  175. Ryo Okumura, Seiichi Takamatsu, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Solution Electrochemiluminescent Microfluidic Cell for Flexible and Stretchable Display,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 947-950, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  176. Yuta Yoshihata, Atsushi Takei, Nguyen Binh-Khiem, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Micro Liquid Prism,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), pp. 967-970, Sorrento, Italy, January 26-29, 2009. [Proceedings]

  177. others '09

  178. Tetsuo Kan, Yusuke Takei,Hiroaki Onoe, Eiji Iwase,Tetsuji Dohi, Kiyoshi Matsumoto, and Isao Shimoyama, “Nano-Mechanical Structure Fabrication Technology for Highly Integrated, Complex MEMS,” International Conference on Electronics Packaging 2009 (ICEP2009), 16A-3-1, April, 2009.

  179. Kenta Kuwana, Yun Jung Heo, Kiyoshi Matsumoto, and Isao Shimoyama, “Measurement Method of Cell-surface Receptor Concentration Using Antibody Conjugated Piezoresistive Cantilever,” The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS2009), 4B2-2, Jeju, Korea, 1-5 November, 2009.
  180. 2008

    APCOT '08

  181. Kentaro Noda, Nguyen Binh-Khiem, Atsushi Takei, Seiichi Yoshimi, Isao Shimoyama, “MEMS for Robots in Aging Society,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 1P2, Tainan, Taiwan, June 22-25, 2008.

  182. Kentaro Noda, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Flexible Tactile Sensor Sheet with Thin Si Piezoresistive Cantilevers Peeled off from SOI with PDMS Sheet,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 1B2-3, Tainan, Taiwan, June 22-25, 2008.

  183. Yun Jung Heo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Stretchable Micropatterned Substrates using Pneumatic Actuators for Studying Mechanical-Stress-Dependent Cell Response,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 1C2-1, Tainan, Taiwan, June 22-25, 2008.

  184. Binh-Khiem Nguyen, Kiyoshi Matsumoto, Isao Shimoyama, “Reflective Display Device with an Encapsulated Droplet Array of Ionic Liquid ,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 1D2-1, Tainan, Taiwan, June 22-25, 2008.

  185. Yasushi Hashimoto, Akihito Nakai, Hajime Kawano, Kiyoshi Matsumoto, Isao Shimoyama, “Thin and Small Ultrasonic Distance Sensor with Thermoacoustic Transmitter and Piezoresistive Cantilever Receiver,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 2B3-2, Tainan, Taiwan, June 22-25, 2008.

  186. Koichi Ishitaki1, Yusuke Takei1, Eiji Iwase1, Kiyoshi Matsumoto1, and Isao Shimoyama, “Floating Silicon Structure Supported by Carbon Nanotubes,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), Tainan, Taiwan, June 22-25, 2008.

  187. Hiroyuki Kojo, Nguyen Binh-Khiem, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Varifocal Infrared Imaging Lens by Parylene-on-Liquid-Deposition,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 2S32, Tainan, Taiwan, June 22-25, 2008.

  188. Yusuke Tanaka, Akihito Nakai, Eiji Iwase, Takanori Goto, Kiyoshi Matsumoto, Isao Shimoyama, “Triaxial Tactile Sensor Chips with Piezoresistive Cantilevers Mountable on Curved Surface,” Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT '08), 1B1-1, Tainan, Taiwan, June 22-25, 2008.
  189. MEMS '08

  190. Tetsuji Dohi, Hironao Hayashi, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama, “Fabrication Method of Sub-Micrometer Size Planar Gap for the Micro Fabry-Perot Interferometer,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 335-338, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  191. Eiji Iwase, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama, “Hidden Vertical Comb-Drive Actuator on PDMS Fabricated by Parts-Transfer,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 116-119, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  192. Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama, “Three Dimensional Arrangement of Sensors using Development,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 832-835, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  193. Tetsuo Kan, Nguyen Binh-Khiem, Kiyoshi Matsumoto, Isao Shimoyama, “Tunable SPR Coupler by Flexible Polymer Grating,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 774-777, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  194. Seiichi Takamatsu, Kiyoshi Matsumoto, Isao Shimoyama, “Mechanically Flexible and Expandable Display with Conductive-Polymer-Coated Nylon Fabric,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 140-143, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  195. Atsushi Takei, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Liquid Motor Driven by Electrowetting,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 42-45, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  196. Kazuhiko Takagahara, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Batch Fabrication of Carbon Nanotubes at AFM Probe Tips and AFM Imaging,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 713-716, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  197. Hidetosh Takahashi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Air Flow Senser for an Insect-Like Flapping Wing,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 916-919, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  198. Hisashi Terae, Nguyen Binh-Khiem, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Tapered Waveguide by Liquid for a Coupler of Optical Fibers to MEMS Devices,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 794-797, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  199. Masato Muraki, Seiichi Takamatsu, Kiyoshi Matsumoto, Isao Shimoyama, “Organic Semiconductor Based Strain Sensors for Input System on Flexible OLEDs,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 904-907, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]

  200. Yuta Yoshihata, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Scanning Micromirror using Deformation of a Parylene-Encapsulated Liquid Structure,” The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS '08), pp. 770-773, Tucson, Arizona, USA, January 13-17, 2008. [Proceedings]
  201. others '08

  202. Isao Shimoyama, “Five Senses with MEMS for Robots in aging society,” The 10th Korean MEMS Conference, Jeju Island, Korea, April 3-5, 2008.

  203. Isao Shimoyama, “MEMS Commercialization in Japan: Industry-Academia-Government, Tri Helix Industry Development Efforts,” The 14th World MicroMachine Summit, Daejeon, Korea, April 30-May 3, 2008.

  204. Nguyen Binh-Khiem, Kiyoshi Matsumoto, Isao Shimoyama, “Active Parylene-encapsulated droplets for displays,” Spring 2008 ACS National Meeting & Exposition, 1155460, New Orleans, Louisiana, USA, April 6-10, 2008

  205. Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Flexible Tactile Sensor Sheet with Thin Cantilevers for Shear Stress Detection on Curved Surface,” The 17th CISM-IFToMM Symposium on Robot Design, Dynamics, and Control (RoManSy '08), pp. 43-49, Tokyo, Japan, July 5-9, 2008.

  206. Hiroto Tanaka, Kiyoshi Matsumoto, Isao Shimoyama, “Deformation and Aerodynamic Performance of a Flapping Artificial Butterfly Wing in Free Flight,” Annual Main Meeting of the Society of Experimental Biology (SEB '08), S53-S54, Marseille, Franc, July 6-10, 2008. [Proceedings]

  207. Kenta Kuwana, Tetsuji Dohi, Yasushi Hashimoto, Kiyoshi Matsumoto, Isao Shimoyama, “Implantable Telemetry Capsule for Monitoring Arterial Oxygen Saturation and Heartbeat,” The 30th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC '08), pp. 3204-3207, Vancouver, British Columbia, Canada, Augast 20-24, 2008.

  208. Hiroto Tanaka, Kiyoshi Matsumoto, Isao Shimoyama, “Design and Performance of Micromolded Plastic Butterfly Wings on Butterfly Ornithopter”, The 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS '08), pp. 3095-3100, Nice, France, September 22-26, 2008. [Proceedings]

  209. Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama, “Tactile Sensor with Standing Piezoresistive Cantilevers Covered with 2-Layer Skin Type Structures for Texture Detection of Object Surface,” The 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS '08), pp. 3953-3958 , Nice, France, September 22-26, 2008. [Proceedings]

  210. Yun Jung Heo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Stretchable Substrates using Pneumatic Actuators for Monitoring Mechanical-Stress-Dependent Cell Response,” The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS '08), pp. 579-581, San Diego, California, USA, October 12-16, 2008.

  211. Kenta Kuwana, Kiyoshi Matsumoto, Isao Shimoyama, “Measurement of Protein Concentration using the Binding Force between Two Surfaces,” The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS '08), pp. 982-984, San Diego, California, USA, October 12-16, 2008.

  212. 2007

    Transducers '07

  213. Tetsuji Dohi, Kenta Kuwana, Kiyoshi Matsumoto, Isao Shimoyama, “A Standing Micro Coil for A High Resolution MRI,” The 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), pp. 1311-1315, Lyon, France, June 10-14, 2007. [Proceedings]

  214. Atsuchi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Thin Electrowetting Contraolled Optical Systems with Pan/Tilt and Variable Focus Functions,” The 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), pp. 1317-1318, Lyon, France, June 10-14, 2007. [Proceedings]

  215. MEMS '07

  216. Masaki Shuzo, Koutaroh Okada, Ryohei Kanzaki, Isao Shimoyama, “Fluorescence Detection System Using a Metal-coated Glass Micropipette,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 207-210, Kobe, Japan, January 21-25, 2007. [Proceedings]

  217. Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “3D Integratoin of Heterogeneous MEMS Structures by Stampig Transfer,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 175-178, Kobe, Japan, January 21-25, 2007. [Proceedings]

  218. Tetsuo Kan, Kiyoshi Matsumoto Isao Shimoyama, “Nano-Pattern Replication Using Parylene Thin Film for Optical Application,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 819-822, Kobe, Japan, January 21-25, 2007. [Proceedings]

  219. Yusuke Takei, Kiyoshi Matsumoto, Isao Shimoyama, “Force Sensor Using Carbon Nanotubes Directry Synthesized on Micro Structure,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 827-830, Kobe, Japan, January 21-25, 2007. [Proceedings]

  220. Hiroto Tanaka, Kiyoshi Matsumoto, Isao Shimoyama, “A Three-dimensional Artificial Insect Wing by Microcasting of Thermosetting Plastic Using a Thin Elastic Mold,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 381-384, Kobe, Japan, January 21-25, 2007. [Proceedings]

  221. Sachio Murao, Seiichi Takamatsu, Binh-Khiem Nguyen, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Electrochromic Voxel Array for 3D Display,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07) , pp. 719-722, Kobe, Japan, January 21-25, 2007. [Proceedings]

  222. Binh-Khiem Nguyen, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Electrically Driven Varifocal Micro Lens Fabricated by Depositin Parylene Directly on Liquid,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 305-308, Kobe, Japan, January 21-25,2007. [Proceedings]

  223. Akihiro Isozaki, Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama, “Nanocrystalline Porous Silicon Ultrasonic Transmitter with Patterned Emission Area,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 55-58, Kobe, Japan, January 21-25, 2007. [Proceedings]

  224. Kazuhiko Takagahara, Yusuke Takei, Kiyoshi Matsumoto, Isao Shimoyama, “Batch Fabrication of Carbon Nanotubes on Tips of a Silicon Pyramid Array,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 855-858, Kobe, Japan, January 21-25, 2007. [Proceedings]

  225. Hidetoshi Takahashi, Tetsuji Dohi, Kiyoshi Matsumoto, Isao Shimoyama, “A Micro Planar Coil for Local High Resolution Magnetic Resonance Imaging,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '07), pp. 549-552, Kobe, Japan, January 21-25, 2007. [Proceedings]

  226. others '07

  227. Isao Shimoyama, Nguyen Binh-Khiem, Yuta Yoshihata, “MEMS Devices as Display,” The 14th International Display Workshops (IDW2007), Sapporo, Japan, December 5-7, 2007.

  228. Yasumasa Ichikawa, Tetsuo Kan, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Experimental Analysis of Liposme Water Two Phase Flow in Micro Channel for Localizing Reaction System using Liposome,” The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2007), pp. 934-936, Paris, France, October 7-11, 2007.

  229. Kenta Kuwana, Kiyoshi Matsumoto, Isao Shimoyama, “Measurement of Binding Force between a Receptor-Coated Piezoresistive Cantilever and a Ligand-Coated Surface for Protein Concentration Sensor,” The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2007), pp. 1095-1097, Paris, France, October 7-11, 2007.

  230. Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama, “Effect of Slab Deflection on a Mechano-Optic Modulator,” 4th International Conference on Group IV Photonics (GFP 2007), pp. 46-48, Tokyo, Japan, September 19-21, 2007.

  231. Isao Shimoyama, “Fine MEMS -The Highly Integrated, Complex MEMS Project-,” The 13th World MicroMachine Summit, Venice, Italy, April 26-28, 2007.

  232. 2006

    MEMS '06

  233. Masaki Shuzo, Koutaroh Okada, Hidekazu Arai, Ryohei Kanzaki, Isao Shimoyama, “High Resolution and S/N Ratio Nano Probing System,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 550-553, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  234. Akihito Nakai, Kazunori Hoshino, Kiyoshi Matsumoto,Isao Shimoyama, “Transmissive Scanning Micromirrors for Autostereoscopic Display,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 40-43, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  235. Tetsuo Kan, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Measurement of Light Intensity Field with a Fluorescent Bead Cantilever,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 822-825, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  236. Tomoyuki Takahata, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Photonic Crystal Attenuator with A Flexible Waveguide and Nano-Rods,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 834-837, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  237. Yusuke Takei, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Density Control of Carbon Nanotubes Using Ethanol Vapor Flow,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 914-917, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  238. Kentaro Noda, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Fabrication of the Flexible Sensor using SOI Wafer by Removing the Thick Silicone Layer,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 122-125, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  239. Binh Khiem Nguyen, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Insertion Force Sensor by Sidewall-Doping with Rapid Thermal Diffusion,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 662-665, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  240. Atsushi Takei, Eiji Iwase, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Angle Tunable Liquid Wedge Prism driven by Electro-Wetting,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 36-39, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  241. Naoko Tsujiuchi, Eiji Iwase, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “A Surface Plasmon Resonance Sensor with A V-Shaped Silicon Prism Array,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 522-525, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  242. Seiichi Yoshimi, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “A Cantilever Microphone Using Resonance of Closed-End Air Columns,” The 19th International Conference on Micro Electro Mechanical Systems (MEMS '06), pp. 574-577, Istanbul, Turkey, January 22-26, 2006. [Proceedings]

  243. others '06

  244. Akihito Nakai, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Multiview autostereoscopic display with double-sided reflecting scanning micromirrors,” IS&T/SPIE Electronic Imaging 2006, San Jose, California, USA, January 15-19, 2006.

  245. Kentaro Noda, Isao Shimoyama, “A Shear Stress Sensing for Robot Hands -Orthogonal arrayed Piezoresistive Cantilevers standing in Elastic Material-,” The 14th Symposium on Haptic Interfaces for Virtual Environment and Teleoperator Systems, pp. 574-577, Arlington, Virginia, USA, March 25-26, 2006.

  246. Isao Shimoyama, “Fine MEMS -Upcoming MEMS Project-,” The 12th World MicroMachine Summit, Beijing, China, April 27-29, 2006.

  247. Isao Shimoyama, Kiyoshi Matsumoto, Takeyoshi Dohi, Shigehiro Morikawa, Hongen Liao, Kiyoshi Matsumiya, Junnichi Tokuda, Tetsuji Dohi, Katsunori Urano, Ken Masamune, “Basic Study on High-Resolution MR Imaging with Sub-Miniature RF Coil,” World Congress on Medical Physics and Biomedical Engineering, Seoul, Korea, August 27-September 01, 2006.

  248. Tomoyuki Takahata, Kiyoshi Matsumoto, Isao Shimoyama, “Mechanical Tuning of 2D Photonic Crystal with MEMS-based Electrostatic Actuator,” The 19th Annual Meeting of the IEEE Lasers & Electro-Optics Society, Montreal, Canada, October 29-November 2, 2006.

  249. Masaki Shuzo, Tomoki Kazawa, Koutaroh Okada, Ryohei Kanzaki, Isao Shimoyama, “Intracellular Recording and Calcium Measurement in a Single Neuron of Aplysia Using a Nano-Probe,” The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2006), pp. 1402-1404, Tokyo, Japan, November 5-9, 2006.

  250. Isao Shimoyama, “Advances in Research and Applications of Integrated MEMS in Japan, 日本におけるMEMS開発の方向性と高集積・複合MEMS製造技術開発プロジェクト,” The 12th International Micromachine/Nanotech Symposium, Tokyo, Japan, November 8, 2006.

  251. Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Angle Tunable Prism for Optical Scanner,” The 13th International Display Workshops (IDW2006), pp. 1607-1610, Otsu, Japan, December 6-8, 2006.

  252. 2005

    Transducers '05

  253. Sumito Nagasawa, Hidekazu Arai, Ryohei Kanzaki, Isao Shimoyama, “Integrated multi-Functional Probe for Active Measurements in a Single Neural Cell,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), pp. 1230-1233, Seoul, Korea, June 5-9, 2005. [Proceedings]

  254. Masaki Shuzo, Hidekazu Arai, Ryohei Kanzaki, Isao Shimoyama, “ A Nano Lead on a Force Sensing Cantilever for Bilateral Manipulation of a Single Cell,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), pp. 1720-1723, Seoul, Korea, June 5-9, 2005. [Proceedings]

  255. Tetsuji Dohi, Kiyoshi Matsumoto, Isao Shimoyama, “The Flexible Micro Resonator for the Magnetic Resonance Catheter,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), pp. 2143-2146, Seoul, Korea, June 5-9, 2005. [Proceedings]

  256. Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama, “Sub-Micron Aperture Plate for Intracellular Calcium Transient Mesurement,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), pp. 1306-1309, Seoul, Korea, June 5-9, 2005. [Proceedings]

  257. Shinsuke Onoe, Hiroto Tanaka, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Miniature Fuel Cell with Conductive Silicon Electrodes,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), pp. 1296-1299, Seoul, Korea, June 5-9, 2005. [Proceedings]

  258. Yusuke Takei, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “ Selective Bridging of Single-Walled Carbon Nanotubes Controlled with Electric Field Appried to SiliconStructures,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), pp. 101-104, Seoul, Korea, June 5-9, 2005. [Proceedings]

  259. Takaharu Nagai, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Direct Ink-Jet Printing of Electric Materials with Active Allignment Control,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), pp. 1461-1464, Seoul, Korea, June 5-9, 2005. [Proceedings]
  260. MEMS '05

  261. Kazunori Hoshino, Takaharu Nagai, Yoshio Mita, Masakazu Sugiyama, Kiyoshi Matsumoto, Isao Shimoyama, “Active Ink-Jet Nozzles Equiped With Arrayed Visual Sensors For Parallel Alignment Control,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 48-51, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  262. Masaki Shuzo, Hidekazu Arai, Ryohei Kanzaki, Isao Shimoyama “Silicon Based Nano Lead for Single Cell Recording,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 766-769, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  263. Tetsuji Dohi, Kiyoshi Matsumoto, Isao Shimoyama, “The Micro Fabry-Perot Iinterferometer fot The Spectrum Endoscope,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 830-833, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  264. Eiji Iwase, Isao Shinoyama, “Multi-Step Sequential Batch Self-Assembly of Three-Dimensional Micro-Structures using Magnetic Field,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 588-591, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  265. Hiroaki Onoe, Murat Gel, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Binding Force Measurement between Micro-Scale Flat Surfaces in Aqueous Environmnet by Force-Sensing Piezoresistive Micro-Cantilevers,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 16-19, Miami, Florida, USA, January 30-Feb. 3, 2005. [Proceedings]

  266. Tomoyuki Takahata, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Photonic Crystal Tuned by Cantilever,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 112-115, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  267. Seiichi Takamatsu, Kazunori Hoshino, Kiyoshi Matsumoto, Tsutomu Miyasaka, Isao Shimoyama, “Biomolecular Image Sensor of Patterned bacterioRhodopsin by Electrodepsotion,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 847-850, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  268. Hiroshi Saito, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Compound Eye Shaped Flexible Organic Image Sensor with a Tunable Visual Field,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 96-99, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  269. Hideyuki Kinoshita, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Thin Compound Eye Camera with a Zooming Function by Reflective Optics,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 235-238, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  270. Masakazu Tohara, Eiji Iwase, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, ““Pop-up” Display with 3-dimensional Microlens Structures,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 231-234, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

  271. Kentaro Noda, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “300nm-thick Cantilever in PDMS for Tactile Sensing,” The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 283-286, Miami, Florida, USA, January 30-February 3, 2005. [Proceedings]

    others '05

  272. Isao Shimoyama, “MEMS Market Trends in Japan,” The 11th World MicroMachine Summit, Richardson, Texas, USA, May 1-4, 2005.

  273. Hiroto Tanaka, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Flight Dynamics of a Butterfly-type Ornithopter,” 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS '05), pp. 310-315, Edmonton, Alberta, Canada, August 2-6, 2005. [Proceedings]

  274. Isao Shimoyama, “Fine MEMS,” The 11th International Micromachine/Nanotech Symposium, Tokyo, Japan, November 10, 2005.

  275. 2004

    MEMS '04

  276. Kazunori Hoshino, Yoichi Murakami, Shigeo Maruyama, Kiyoshi Matsumoto, Isao Shimoyama, “Electrostatically-Actuated Micro Cantilevers for Electro-Mechanical Measurement of Single-Walled Carbon Nanotubes Grown by Catalytic CVD,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '04), pp. 446-449, Maastricht, The Netherlands, January 25-29, 2004. [Proceedings]

  277. Tetsuji Dohi, Kiyoshi Matsumoto, Isao Shimoyama, “The Optical Blood Test Device with the Micro Fabry-Perot Interferometer,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '04), pp. 403-406, Maastricht, The Netherlands, January 25-29, 2004. [Proceedings]

  278. Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “The Structural-Color Based on the Mechanism of Butterfly Wing Coloring for Wide Viewing Angle Reflective Display,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '04), pp. 105-108, Maastricht, The Netherlands, January 25-29, 2004. [Proceedings]

  279. Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama, “Sequential Self-Assembly by Controlling Interactive Forces between Microparticles,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '04), pp. 5-8, Maastricht, The Netherlands, January 25-29, 2004. [Proceedings]

  280. Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama, “Cell-Culture Plate with Sub-micron Aperture Array for Near-Field Fluorescent Measurement,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '04), pp. 399-402, Maastricht, The Netherlands, January 25-29, 2004. [Proceedings]

  281. Koichi Yamada, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Electro-Static Trapping and Deposition of Nanoparticles in a Submicron Narrow Gap for a Lateral-Electrode LED,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '04), pp. 49-52, Maastricht, The Netherlands, January 25-29, 2004. [Proceedings]

  282. others '04

  283. Isao Shimoyama, “NanoOnMicro Devices,” The 10th World MicroMachine Summit, Grenoble, France, May 3-5,2004.

  284. Y. Ichikawa, Y. Matsumoto, H. Ohashi, “Bubbly Flow around a Circular Cylinder,” International Conference on Multiphase Flow (ICMF-2004), p. 337, Yokohama, Japan, June 2, 2004.

  285. Tomoyuki Takahata, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Surface Acoustic Wave Optical Deflector for Surface Plasmon Resonance Sensor,” 2004 IEEE/LEOS International Conference on Optical MEMS (OpticalMEMS '04) and Their Applications, pp. 70-71, Takamatsu, Japan, August 22-26, 2004.

  286. Isao Shimoyama, “Market Trends of MEMS, MEMSの市場動向,” The 10th International Micromachine/Nanotech Symposium, Tokyo, Japan, November 11, 2004.

  287. 2003

    Transducers '03

  288. Kazunori Hoshino, Soroj Triteyaprasert, Kiyoshi Matsumoto, Isao Shimoyama, “Electrowetting Based Actuation for Microinjection,” The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), pp. 1800-1803, Boston, Massachusetts, USA, June 8-12, 2003. [Proceedings]

  289. Sumito Nagasawa, Isao Shimoyama, “Calcium Measurement Method by Fluorescent Analyses Using a Glass Micro Injector,” The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), pp. 111-114, Boston, Massachusetts, USA, June 8-12, 2003. [Proceedings]

  290. Masanao Motoyama, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Electro-Statically Actuated Light Emitting Device Using OLED,” The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), pp. 1506-1509, Boston, Massachusetts, USA, June 8-12, 2003. [Proceedings]

  291. MEMS '03

  292. Kazunori Hoshino, Kouichi Yamada, Kiyoshi Matsumoto, Isao Shimoyama, “A Diffraction-Limited-Resolution Full-Color Display with a 10 µm-square Visual Field,” The 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 283-286, Kyoto, Japan, January 19-23, 2003. [Proceedings]

  293. Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama, “Simulation, Fabrication and Evaluation of Microinductor-based Artificial Tactile Mechanoreceptor Embedded in PDMS,” The 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 206-209, Kyoto, Japan, January 19-23, 2003. [Proceedings]

  294. Murat Gel, Isao Shimoyama, “Sub-Micron Thick High Sensitive Piezoresistive Cantilevers by Boron Etch Stop and Argon Implantation,” The 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 494-497, Kyoto, Japan, January 19-23, 2003. [Proceedings]

  295. Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama, “3D Micro Self-assembly Using a Hydrophobic Interaction Controlled by SAMs,” The 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 606-609, Kyoto, Japan, January 19-23, 2003. [Proceedings]

  296. Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama, “Thin-Film Waveguide with a Lens Effect Terminal for Optical Sensing Devices,” The 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 315-318, Kyoto, Japan, January 19-23, 2003. [Proceedings]

  297. Haruki Chujo, Kiyoshi Matsumoto, Isao Shimoyama, “A High Flow Rate Electro-Osmotic Pump with Small Channels in Parallel,” The 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 351-354, Kyoto, Japan, January 19-23, 2003. [Proceedings]

  298. Takashi Hasegawa, Kiyoshi Matsumoto, Isao Shimoyama, “30 µm-pitch Stripes of OLED Patterned by Stamping Lift-Off Method,” The 16th IEEE International Micro Electro Mechanical Systems Conference (MEMS '03), pp. 546-549, Kyoto, Japan, January 19-23, 2003. [Proceedings]

  299. others '03

  300. Takashi Yasuda, Koichi Suzuki, Isao Shimoyama, “Automatic Transportation of a Droplet on a Wettability Gradient Surface,” The 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems (microTAS '03), pp. 1129-1132, Squaw Valley, California, USA, October 5-9, 2003.

  301. Isao Shimoyama, “Nano on Micro,” The 9th International Micromachine/Nanotech Symposium, Tokyo, Japan, November 13, 2003.

  302. Isao Shimoyama, “Ubiquitous Robot Devices,” The University of Tokyo 21st Century COE, "Information Science and Technology Strategic Core," International Symposium on Real-World Information Systems, Tokyo, Japan, September 8-9, 2003.

  303. Isao Shimoyama, “Advantages of MEMS in Fluid Research,” Turbulence and Shear Flow Phenomena-2003 (TSFP3), Sendai, Japan, June 26, 2003.
  304. 2002

    MEMS '02

  305. Kazunori Hoshino, Akihito Nakai, Isao Shimoyama, “An All-Polymer Thin-Film Scanning Optical Filter for 3D-Image Displays,” The 15th IEEE International Micro Electro Mechanical Systems (MEMS '02), Las Vegas, Nevada, USA, January 20-24, 2002. [Proceedings]

  306. Yong Kwun Lee, Isao Shimoyama, “A Multi-Channel Micro Valve for Micro Pneumatic Artificial Muscle,” The 15th IEEE International Micro Electro Mechanical Systems (MEMS '02), pp. 702-705, Las Vegas, Nevada, USA, January 20-24, 2002. [Proceedings]

  307. Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama, “Fabrication of High-Aspect-Ratio PZT Thick Film Structure Using Sol-Gel Technique and SU-8 Photoresist,” The 15th IEEE International Micro Electro Mechanical Systems (MEMS '02), pp. 168-171, Las Vegas, Nevada, USA, January 20-24, 2002. [Proceedings]

  308. Eiji Iwase, Shoji Takeuchi, Isao Shimoyama, “Sequential Batch Assembly of 3-D Microstructures with Elastic Hinges by a Magnetic Field,” The 15th IEEE International Micro Electro Mechanical Systems (MEMS '02), pp. 188-191, Las Vegas, Nevada, USA, January 20-24, 2002. [Proceedings]

  309. Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama, “A Stereoscopic Display with a Vibrating Microlens Array,” The 15th IEEE International Micro Electro Mechanical Systems (MEMS '02), pp. 524-527, Las Vegas, Nevada, USA, January 20-24, 2002. [Proceedings]

  310. others '02

  311. Isao Shimoyama, “Strategy towards Fusion of Nano and Micro Systems,” SPIE's International Symposium, Melbourne, Australia, December 16-18, 2002.

  312. Isao Shimoyama, “Fusion of Micro and Nano Technology "Nano-on-Micro",” NSF Tri-National Workshop on Advances in Micro and Nano Technologies for Sensing Applications, Melbourne, Australia, December 12-14, 2002.

  313. Isao Shimoyama, “Strategy towards Fusion of Nano and Micro Systems,” The 8th International Micromachine/Nanotech Symposium, Tokyo, Japan, November 14, 2002.

  314. Masaki Shuzo, Kiyoshi Matsumoto, Isao Shimoyama, “Remote Inductive Powering for EMG Telemetering,” International Workshop on Power MEMS (PowerMEMS '02), Tsukuba, Japan, November 11-12, 2002.

  315. Tetsuji Dohi, Isao Shimoyama, “A Micro Probe for Measuring Resistance against a Cell,” The 6th International Conference on Motion and Vibration Control (MOVIC '02), Urawa, Japan, August 19-23, 2002.

  316. Shoji Takeuchi, Isao Shimoyama, “A Remote Inductive Powering System for Driving Microacuators,” The 6th International Conference on Motion and Vibration Control (MOVIC '02), Urawa, Japan, August 19-23, 2002.

  317. Isao Shimoyama, “Our Road Map toward the Next,” Hannover Messe; Micro Technology Forum, Hannover, Germany, April 15-20, 2002.
  318. 2001

    Transducers '01

  319. Murat Gel, Shoji Takeuchi, Isao Shimoyama, “Fabrication Method for Out-of Plane Coil by Surface Micromachining,” The 11th International Conference on Solid-State Sensors and Actuators (Transducers '01/Eurosensors XV), Munich, Germany, June 10-14, 2001.

  320. Isao Shimoyama, Kazunori Hoshino, Yoshihiko Ozaki, Satoshi Tamaki, Shoji Takeuchi, Takashi Yasuda, “MEMS Meets Insects,” The 11th International Conference on Solid-State Sensors and Actuators (Transducers '01/Eurosensors XV), Munich, Germany, June 10-14, 2001.

  321. MEMS '01

  322. Shoji Takeuchi, Nobuyuki Futai, Isao Shimoyama, “Selective Drive of Electrostatic Actuators using Remote Inductive Powering,” The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 574-577, Interlaken, Switzerland, January 21-25, 2001. [Proceedings]

  323. Kazunori Hoshino, Isao Shimoyama, “An Elastic Thin-film Microlens Array with a Pneumatic Actuator,” The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 321-324, Interlaken, Switzerland, January 21-25, 2001. [Proceedings]

  324. Norihisa Miki, Isao Shimoyama, “An Attitude Control of a Micro-Flight Mechanism with Rotational Wings,” The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 602-605, Interlaken, Switzerland, January 21-25, 2001. [Proceedings]

  325. Murat Gel, Isao Shimoyama “High Aspect Ratio Micro Actuation Mechanism,” The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 582-585, Interlaken, Switzerland, January 21-25, 2001. [Proceedings]

  326. others '01

  327. Sumito Nagasawa, Ryohei Kanzaki, Isao Shimoyama, “An Evaluation Method for Insect Sensorimotor Models Using an Insect-Size Mobile Robot,” 2001 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS '01), pp. 551-556, Hawaii, USA, 29 October-3 November, 2001. [Proceedings]

  328. Shoji Takeuchi, Isao Shimoyama, “A Wireless Telemetry System with an SMA Microelectrode for Neural Recording of Freely Moving Insects,” The 4th Japan-France Conference on Biosensor and Bioelectronics, Tokyo, Japan, 23-26 October, 2001.

  329. Sumito Nagasawa, Ryohei Kanzaki, Isao Shimoyama, “Evaluation of a Model for an Olfactory Sensorimotor System of a Silkworm Moth Using an Insect-size Mobile Robot,” The 6th International Congress of Neuroethology, #20, Bonn, Germany, July 28-August 3, 2001.

  330. Noriyasu Ando, Isao Shimoyama, Ryohei Kanzaki, “Wireless Transmission of Muscle Potentials from a Freely Flying Hawakmoth, Agrius convolvuli,” The 6th International Congress of Neuroethology, #45, Bonn, Germany, July 28-August 3, 2001.

  331. Murat Gel, Kazunori Hoshino, Isao Shimoyama, “Optical Displacement Detection Method with On-Chip Photodiode for High Aspect Ratio Actuating Structures,” 2001 IEEE/LEOS International Conference on Optical MEMS (OpticalMEMS '01), pp. 103-104, Okinawa, Japan, September 25-28, 2001.

  332. Noriyasu Ando, Isao Shimoyama, Ryohei Kanzaki, “Wireless Transmission of Muscle Potentials from a Freely Flying Hawkmoth, Agrius convolvuli,” The International Symposium Neural Organization and Plasticity in the Microbrain System, #301, Ibaraki, Japan, October 13-14, 2001.

  333. Sumito Nagasawa, Ryohei Kanzaki, Isao Shimoyama, “Synthetic Investigation into an Olfactory Sensorimotor System of a Silkworm Moth,” The International Symposium Neural Organization and Plasticity in the Microbrain System, #9, Ibaraki, Japan, October 13-14, 2001.

  334. Noriyasu Ando, Isao Shimoyama, Ryohei Kanzaki, “The New Neuoethological Method for Evaluation of Insect Bioactive Molecules: Wireless Transmission of Muscle Potentials from a Freely Flying Moth,” The 14th Naito Conference on Bioactive Natural Products and Their Modes of Action [III]: Insect Bioactive Molecules and Their Modes of Action, PS[II]-50, Kanagawa, Japan, October 16-19, 2001.

  335. Isao Shimoyama, “R&D Strategies for Next Generation Micromachine Technology,” The 7th International Micromachine Symposium, Tokyo, Japan, October 31-November 1, 2001.

  336. 2000

    MEMS '00

  337. Kazunori Hoshino, Fabrizio Mura, Isao Shimoyama, “A One-Chip Scanning Retina with an Integrated Micro-Mechanical Scanning Actuator for a Compound Eye Visual Sensor,” The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 721-726, Miyazaki, Japan, 23-27 January, 2000. [Proceedings]

  338. Norihisa Miki, Isao Shimoyama, “A Micro-Flight Mechanism with Rotational Wings,” The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 158-163, Miyazaki, Japan, 23-27 January, 2000. [Proceedings]

  339. Yoshihiro Ozaki, Tomoyuki Ohyama, Takashi Yasuda, Isao Shimoyama, “An Air Flow Sensor Modeled on Wind Receptor Hairs of Insects,” The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 531-536, Miyazaki, Japan, 23-27 January, 2000. [Proceedings]

  340. others '00

  341. Nobuyuki Futai, Takashi Yasuda, Isao Shimoyama, “Micromachined Planar Coil Tactile Sensors Implantable in Soft Structure,” The 2000 ASME International Mechanical Engineering Congress & Exposition (IMECE '00), pp. 51-56, Orlando, Florida, USA, November, 2000.

  342. Shoji Takeuchi, Isao Shimoyama, “An RF-telemetry System with Shape Memory Alloy Microelectrodes for Neural Recording of Freely Moving Insects,” The 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, pp. 491-496, Lyon, France, October 12-14, 2000. [Proceedings]